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INTERNATIONAL CONFERENCE

2017


2.  The 10th Asian Aerosol Conference (AAC 2017) _Jeju, Korea (July.2-6)

 ---Development of a Cyclone-Based Bioaerosol Sampler with Liquid Film_Giwoon Sung,Hyeong U Kim ,Jihye Choi ,Taesung Kim ( Oral Presentation)

 ---Development of Electric Field Assisted Megasonic Atomization for Generating Nanoparticles_Hyeong U Kim ,Vinit Kanade ,Atul Kulkarni, Soohyun Ha ,Dongjoo Shin,Taesung Kim ( Oral Presentation)

 ---Investigation of Process Mediated Particle Characteristics Using PBMS_Dongbin Kim ,Hyeongu Kim ,Ju-young Yun, Sang-woo Kang ,Taesung Kim ( Oral Presentation)


1. 2017 Asian Conference on Thermal Sciences (ACTS 2017) _Jeju, Korea (Mar.26-30)

 ---Cross-plane zt evalueation system_Yeongseok Kim ,Sang-Woo Kang ,Jae Yong Song ,Hyeong U Kim ,Taesung Kim ( Oral Presentation)



2016

4. 2016 International Conference on Planarization/CMP Technology (ICPT 2016) _Beijing, China (Oct.17-19)

 ---Effects of Oxidants on the Material Removal Rate in Oxide Chemical Mechanical         Polishing_Cheolmin Shin, Jinhak Choi, Sanghyuk Jeon, Taesung Kim (Poster Presentation)

--- Analysis of Pad Surface Change Using the Optical Sensor in Real Time_Seokjun Hong, Hyunjae Chung, Cheolmin Shin, Taesung Kim (Oral Presentation)

--- Study of Stress Distributions on the Wafer at the CMP Process Using Numerical and Experimental Methods_Jinwoo Park, Cheolmin Shin,  Hongyi Qin,Taesung Kim (Oral Presentation)

--- Effects of Slurry Additives under Acid Condition for 3D NAND gate Flash Memory_Sanghuck Jeon, Taesung Kim (Poster Presentation)

--- HLD CMP Screatch on Gate Last Process_Sungil Cho, Kyungil Cho, Jinwoo Kim, Taesung Kim (Poster Presentation)

---Effect of Slurry Additives on Material Removal Rate and Nanoscale Surface Uniformity of Cu Wafers During CMP_Sungjae Jang, Jung Hwan Song, Taesung Kim (Poster Presentation)

---Effect of Metal Ion Doping in Ceria Slurry for Chemical Mechanical Planarization_Jinhak Choi, Cheolmin Shin, Taesung Kim (Oral Presentation)

---Chemical Mechanical Planarization Filter Life-Cycle Enhancement Test through the Slurry Supply System_Sangyoon Shin, Horim Lee, Taesung Kim (Oral Presentation)

--- Development of Real-Time and Process Monitoring of Liquid Chemical Concentration during Semiconductor Manufacturing _Kihong Park, Atul Kulkarini, Taesung Kim (Oral Presentation)

3.  Uurosensors 2016 _budapest, Hungary (Aug. 4-7)

--- Fiber optic lateral coupling force sensor for biomedical applications _Jang Ah Kim, Atul Kulkarni, Changmin Kim, Kihong Park, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Hyeong-U Kim, Hye Youn Kim, Atul Kulkarni, ChISUNG Ahn, Mingu Kim, Min-Ho Lee, Taesung Kim  (Poster Presentation)

2. 20th International Vacuum Congress _Busan, Korea (Aug. 21-Aug. 26)

--- Fluid dynamic numerical analysis in graphene growth by chemical vapor deposition _Giwoon Sung, Yinhua Jin, Taesung Kim  (Poster Presentation)

--- The optimization of hydrogen sulfide plasma-etching endpoint in molybdenum sulfurization _Mingu Kim, Chisung Ahn, Juhyun Son, Taesung Kim  (Poster Presentation)

--- Preparation of high purity graphene quantum dots for bio imaging _Yinhua Jin, Hongyi Qin, Sun-young Kim, Yong Taik LIM, Taesung Kim (Oral Presentation)

--- Surface cleaning using CO2 gas cluster for semiconductor device _Yujin Cho, Hongyi Qin, Taesung Kim (Oral Presentation)

1. The 18th International Conference on Crystal Growth and Epitaxy _Nagoya, Japan (Aug. 7-Jun. 12)

--- Synthesis of Wafer Scale Molybdenum Oxide (MoO3) using PECVD for flexible Gas Sensor Application _J. Son, C. Ahn, H.-U Kim, G. Park, G. kim, H. Sin, T. Kim (Oral Presentation)

--- Graphene quantum dots prepared from graphene hydrogels _H.Y. Qin, Y.H. Jin, Y.J. Cho, C.M. Shin, C.G. Lee, T.S. Kim (Oral Presentation)


2015

4. 228th ECS Meeting _Phoenix, USA (Oct. 11-Oct. 15)

--- Graphene Quantum Dots Prepared from Graphene Hydrogels Basing on Hydrothermal Method _Hongyi Qin, Tao Gong, Jinglin Liu, Yujin Cho, Cheolmin Shin, Changu Lee, Taesung Kim  (Oral Presentation)

--- Dry Electrochemical Etching of MoS 2 Thin Films Using Plasma System _Chisung Ahn, M.H.Jeon, H.U. Kim, K.N. Kim, H. Qin, Y. Kim, G.Y. Yeom, T. Kim  (Oral Presentation)

--- Sensor Units to Measure Multi-Direction Seebeck Coefficient of Micro-Scale Film _Yeongseok Kim, SangWoo Kang, HyeongU Kim, Taesung Kim (Poster Presentation)

3. 2015 International Conference on Planarization/CMP Technology (ICPT) _Chandler, USA (Sep. 30-Oct. 02)

--- Optimal Shape of Retainer Ring Considering Slurry Film Thickness and Edge Exclusion _Jinwoo Park, Cheolmin Shin, Hongyi Qin, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Ki Min, Taesung Kim  (Poster Presentation)

--- Optimization of CO2 bubbling (Carbonation) for post CMP Cleaning Process _Minho Hong, Taesung Kim (Poster Presentation)

--- Characterization of Pad Property Change for Using Different Conditioners _Cheolmin Shin, Seokjun Hong, Sanghuck Jeon, Hongyi Qin, Taesung Kim (Poster Presentation)

--- Friction Monitoring of Conventional Diamond Conditioner and Its Application _Hojoong Kim, Donghyun Lim, Byungil Lee, Hasub Hwang, Taesung Kim (Poster Presentation)

2. 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS) _Milano, Italy (Aug. 25-Aug. 29)

--- Development of an Integrated Optical Contact Force Monitoring Sensor for Cardiac Ablation Catheters _Jang Ah Kim, Changmin Kim, Kihong Park, Atul Kulkarni, Taesung Kim  (Poster Presentation)

--- Photoelectric Properties in Metal Ion Modified DNA Nanostructure _Atul KulkarniSreekantha Reddy Dugasani, JangAh Kim, HyeongU Kim, Sungha Park, Taesung Kim (Poster Presentation)

--- Electrochemical Biosensor based on MoS2-Graphene and IgG-HRP/ALP Nanocomposite _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Poster Presentation)

1. 9th Asian Aerosol Conference _Kanazawa, Japan (Jun. 24-Jun. 27)

--- Investigation of Nano Particles Characteristics Using PCDS _Dongbin Kim, Jihun Mun, HyeongU Kim, JuYoung Yun, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Electric field assisted ultrasonic atomizer for size controlled nanoparticles generation _Sooyhun Ha, Taehyun Hwang, Taesung Kim (Poster Presentation)

--- A Characterization Study of Collimated Particle Beam by Iris Type Lens _Myungjoon Kim, Youngseok Kim, Hongyi Qin, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Development of wet cyclone for bioaerosol sampling _Giwoon Sung, Woengyu Shin, Taesung Kim (Poster Presentation)


2014

7. International Conference on Planarization/CMP Technology (ICPT) 2014 _Kobe, Japan (Nov. 19-Nov. 21)

--- Evaluation of POU filter performance and it's effect on the polishing process _Sunjae Jang, Chulmin Shin, Hongyin Qin, Jichul Yang, Taesung Kim (Oral Presentation)

---Characteristic of Pad Cut Rate as Conditioner Structure _Cheolmin Shin, Sunjae Jang, Hongyi Qin, Jichul Yang, Taesung Kim (Poster Presentation)

6. IEEE Sensors 2014 _Valencia, Spain (Nov. 2-Nov. 5)

--- GLUCOSE WAVEGUIDE SENSOR BASED ON GRAPHENE _Taehyun Hwang, Jang Ah Kim (Poster Presentation)

---FUNCTIONAL GRAPHENE COMPOSITE FILMS FOR SURFACE PLASMON RESONANCE SENSOR TECHNOLOGY _Jang Ah Kim, Taehyun Hwang, Sreekantha Reddy Dugasani, Atul Kulkarni, Sung Ha Park, Taesung Kim (Poster Presentation)

5. 226th ECS Meeting _Cancun, Mexico (Oct. 5-Oct. 9)

--- A Metal-Ion Adsorbent Based on Composite of Graphene Oxide/Poly (1-(3-aminopropyl) Pyrrole) _Hongyi Qin, Tao Gong, Yujin Cho, Changgu Lee, Taesung Kim (Oral Presentation)

---Layered MoS2 based Electrochemical Biosensor _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Oral Presentation)

---Real-Time FET-Based Biosensor Using the Wet Cyclone Air Sampler _ Giwoon Sung, Chisung Ahn, Taesung Kim (Oral Presentation)

---Synthesis of MoS2 Thin Film _Jihun Mun, Dongbin Kim, Younghyeon Shin, Juyoung Yun, Sangwoo Kang, Taesung Kim (Oral Presentation)

4. International Symposium on Ultra Clean Processing of Semiconductor Surfaces _Brussels, Belgium (Sep. 21-Sep. 24)

--- Surface cleaning of graphene by CO2 cluster _Hoomi Choi, Jang Ah Kim, Yujin Cho, Taehyun Hwang, Jonwoo Lee, Taesung Kim (Oral Presentation)

---Retardation phenomenon of oxide removal during the formation dual gate oxide via PR-mask wet etching _Kihyung Ko, Myung Geun Song, Byung Kwon Cho, Bo Un Yoon, Yujin Cho, Taesung Kim (Oral Presentation)

---Effect of DI-water dilution and etchant arm movement on spinning type wet etch _ Huihwan Lee, Dukmin Lim, Taesung Kim (Oral Presentation)

---Effect of nozzle distance and fluid flow rate in jet spray wafer cleaning process _Kwangmin Seo, Daeheon Kim, Yujin Cho, Taesung Kim (Oral Presentation)

3. 2014 International Aerosol Conference _Busan, Korea (Aug. 28-Sep. 2)

--- A Novel Method for Generation of Size Controlled Nanoparticles _Soohyun Ha (Oral Presentation)

---CFD for fly ash transportation in a slope type system _Yeongseok Kim (Oral Presentation)

---Iris Diaphragm Type Aerodynamic Lenses _ Myungjoon Kim (Poster Presentation)

2. 5th International Conference on Nanotechnology: Fundamentals and Applications _Prague, Czech Republic (August 11-13)

---Development of Aperture Changeable Aerodynamic Lenses for Nanoparticle Focusing in Wide-range Conditions _Myungjoon KimHyeongU Kim, Sangwoo Kang, Taesung Kim (Oral Presentation)

---Investigation of Particle Characteristics Using Array Faraday Cup Installed PCDs _Dongbin Kim, Jihun Mun, HyeongU Kim, Sangwoo Kang, Taesung Kim (Oral Presentation)

--- Electric Filed Assisted Ultrasonic Spray for Size Controlled Nanoparticles Generation _Soohyun HaBaekhoon Seong, Taehyun Hwang, Doyoung Byun, Taesung Kim (Oral Presentation)

---Method to Measure the Seebeck Coefficient of Thermoelectric Thin Film for Energy Generation _Yeongseok KimSangwoo Kang, Soohyun Ha, Taesung Kim (Oral Presentation)

1. The 7th Asian Conference on Refrigeration and Air Conditioning _Jeju, Korea (May 18-21)

---Novel environmental monitoring sensor technologies with fiber optics and various sensing layers _Jang Ah Kim (Oral Presentation)

---Optical monitoring of radon aerosols at building construction sites _Soohyun Ha (Oral Presentation)


2013

10. 8th Asian Aerosol Conference _Sydney, Australian (December 02-05)

---In-situ size measurement and analysis of particles in vacuum condition using minimized PBMS _Dongbin Kim (Oral Presentation)

---Numerical performance simulation of aerosol sampler _Giwoon Sung (Oral Presentation)

---Numerical analysis of diaphragm type aerodynamic lenses _Myungjoon Kim (Oral Presentation)

---Modeling of silicone nanoparticles synthesis considered particle charging in ICP type silane plasma reator _Yeong Seok Kim (Poster Presentation)

9. The 1st International Conference on Surface Engineering _Busan, Korea (November 18-21)

---Surface conditioning of graphene by using CO2 gas cluster jet _Taesung Kim

8. International Conference on Planarization/CMP Technology _Hsinchu, Taiwan (Oct 30- Nov 01)

---Experimental study on high compressibility pad for ceria-based poly-stopping CMP _Dongwon Oh (Oral Presentation)

---A novel polystyrene-SiO2 composite nanoparticle for CMP slurry _Hongyi Qin (Oral Presentation)

---A study on the shape of abrasive pattern on CMP conditioner and their effect on coefficient of friction _Cheolmin Shin (Poster Presentation)

---Investigation on Ceria abrasive particles size distribution below wafer by type of polishing pad _Seunghun Bae (Poster Presentation)

---Study on point-of-use filter filtration effeiciency and it's effect on the polishing process _Sunjae Jang (Poster Presentation)

7. 224th ECS Meeting _San Francisco, USA (Oct 27-Nov 01)

---Surface cleaning using CO2 gas cluster for semiconductor device _Yujin Cho (Oral Presentation)

---Synthesis of MoS2 atomic layers with PECVE _HyeongU Kim (Oral Presentation)

---Chemical vapor deposition of MoS2 films _Jihun Mun (Oral Presentation)

---A study on the removal method of Si residue during Si wet etch _Kihyung Ko (Oral Presentation)

6. 3rd International Conference of Saving Energy in Refrigeration and Air-Conditioning _Yeosu, Korea (October 23-25)

---Numerical performance simulation of aerosol sampling _Giwoon Sung (Oral Presentation)

---The synthesis novel polystyrene-SiO2 composite abrasive for CMP slurry _Hongyi Qin (Oral Presentation)

5. The 9th Asian-European International Conference on Plasma Surface Engineering _Jeju, Korea (August 25-30)

---Synthesis of a few layers MoS2 by PECVD _HyeongU Kim (Oral Presentation)

4. Nano Korea 2013 _Seoul, Korea (July 10-12)

---Graphene surface treatment by using CO2 cluster jet _Jang Ah Kim (Oral Presentation)

3. International Forum on Functional Materials _Jeju, Korea (June 27-29)

---Real-time FET based biosensor using air sampler _Chisung Ahn (Oral Presentation)

---Modeling of silicone nanoparticle synthesis in silane plasma reactor _Youngseok Kim (Oral Presentation)

2. 3rd International Conference on Bio-sensing Technology _Sitges, Spain (May 13-15)

---Synthesis of tree-like silicon nanowire grown along the low surface energy direction for biosensor application _Chisung Ahn (Oral Presentation)

---Detection of ligand-receptor binding with graphene coated wavelength-modulated SPR sensor _Jang Ah Kim (Poster Presentation)

---Glucose-sensor combined graphene as photo detecotor with waveguide _Taehyun Hwang (Poster Presentation) 

1. China Semiconductor Technology International Conference _Shanghai, China (March 16-17)

---The Synthesis of novel polystyrene-SiO2 composite abrasive for CMP Slurry _Hongyi Qin (Oral Presentation)


2017


2.  The 10th Asian Aerosol Conference (AAC 2017) _Jeju, Korea (July.2-6)

 ---Development of a Cyclone-Based Bioaerosol Sampler with Liquid Film_Giwoon Sung,Hyeong U Kim ,Jihye Choi ,Taesung Kim ( Oral Presentation)

 ---Development of Electric Field Assisted Megasonic Atomization for Generating Nanoparticles_Hyeong U Kim ,Vinit Kanade ,Atul Kulkarni, Soohyun Ha ,Dongjoo Shin,Taesung Kim ( Oral Presentation)

 ---Investigation of Process Mediated Particle Characteristics Using PBMS_Dongbin Kim ,Hyeongu Kim ,Ju-young Yun, Sang-woo Kang ,Taesung Kim ( Oral Presentation)


1. 2017 Asian Conference on Thermal Sciences (ACTS 2017) _Jeju, Korea (Mar.26-30)

 ---Cross-plane zt evalueation system_Yeongseok Kim ,Sang-Woo Kang ,Jae Yong Song ,Hyeong U Kim ,Taesung Kim ( Oral Presentation)



2016

4. 2016 International Conference on Planarization/CMP Technology (ICPT 2016) _Beijing, China (Oct.17-19)

 ---Effects of Oxidants on the Material Removal Rate in Oxide Chemical Mechanical         Polishing_Cheolmin Shin, Jinhak Choi, Sanghyuk Jeon, Taesung Kim (Poster Presentation)

--- Analysis of Pad Surface Change Using the Optical Sensor in Real Time_Seokjun Hong, Hyunjae Chung, Cheolmin Shin, Taesung Kim (Oral Presentation)

--- Study of Stress Distributions on the Wafer at the CMP Process Using Numerical and Experimental Methods_Jinwoo Park, Cheolmin Shin,  Hongyi Qin,Taesung Kim (Oral Presentation)

--- Effects of Slurry Additives under Acid Condition for 3D NAND gate Flash Memory_Sanghuck Jeon, Taesung Kim (Poster Presentation)

--- HLD CMP Screatch on Gate Last Process_Sungil Cho, Kyungil Cho, Jinwoo Kim, Taesung Kim (Poster Presentation)

---Effect of Slurry Additives on Material Removal Rate and Nanoscale Surface Uniformity of Cu Wafers During CMP_Sungjae Jang, Jung Hwan Song, Taesung Kim (Poster Presentation)

---Effect of Metal Ion Doping in Ceria Slurry for Chemical Mechanical Planarization_Jinhak Choi, Cheolmin Shin, Taesung Kim (Oral Presentation)

---Chemical Mechanical Planarization Filter Life-Cycle Enhancement Test through the Slurry Supply System_Sangyoon Shin, Horim Lee, Taesung Kim (Oral Presentation)

--- Development of Real-Time and Process Monitoring of Liquid Chemical Concentration during Semiconductor Manufacturing _Kihong Park, Atul Kulkarini, Taesung Kim (Oral Presentation)

3.  Uurosensors 2016 _budapest, Hungary (Aug. 4-7)

--- Fiber optic lateral coupling force sensor for biomedical applications _Jang Ah Kim, Atul Kulkarni, Changmin Kim, Kihong Park, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Hyeong-U Kim, Hye Youn Kim, Atul Kulkarni, ChISUNG Ahn, Mingu Kim, Min-Ho Lee, Taesung Kim  (Poster Presentation)

2. 20th International Vacuum Congress _Busan, Korea (Aug. 21-Aug. 26)

--- Fluid dynamic numerical analysis in graphene growth by chemical vapor deposition _Giwoon Sung, Yinhua Jin, Taesung Kim  (Poster Presentation)

--- The optimization of hydrogen sulfide plasma-etching endpoint in molybdenum sulfurization _Mingu Kim, Chisung Ahn, Juhyun Son, Taesung Kim  (Poster Presentation)

--- Preparation of high purity graphene quantum dots for bio imaging _Yinhua Jin, Hongyi Qin, Sun-young Kim, Yong Taik LIM, Taesung Kim (Oral Presentation)

--- Surface cleaning using CO2 gas cluster for semiconductor device _Yujin Cho, Hongyi Qin, Taesung Kim (Oral Presentation)

1. The 18th International Conference on Crystal Growth and Epitaxy _Nagoya, Japan (Aug. 7-Jun. 12)

--- Synthesis of Wafer Scale Molybdenum Oxide (MoO3) using PECVD for flexible Gas Sensor Application _J. Son, C. Ahn, H.-U Kim, G. Park, G. kim, H. Sin, T. Kim (Oral Presentation)

--- Graphene quantum dots prepared from graphene hydrogels _H.Y. Qin, Y.H. Jin, Y.J. Cho, C.M. Shin, C.G. Lee, T.S. Kim (Oral Presentation)


2015

4. 228th ECS Meeting _Phoenix, USA (Oct. 11-Oct. 15)

--- Graphene Quantum Dots Prepared from Graphene Hydrogels Basing on Hydrothermal Method _Hongyi Qin, Tao Gong, Jinglin Liu, Yujin Cho, Cheolmin Shin, Changu Lee, Taesung Kim  (Oral Presentation)

--- Dry Electrochemical Etching of MoS 2 Thin Films Using Plasma System _Chisung Ahn, M.H.Jeon, H.U. Kim, K.N. Kim, H. Qin, Y. Kim, G.Y. Yeom, T. Kim  (Oral Presentation)

--- Sensor Units to Measure Multi-Direction Seebeck Coefficient of Micro-Scale Film _Yeongseok Kim, SangWoo Kang, HyeongU Kim, Taesung Kim (Poster Presentation)

3. 2015 International Conference on Planarization/CMP Technology (ICPT) _Chandler, USA (Sep. 30-Oct. 02)

--- Optimal Shape of Retainer Ring Considering Slurry Film Thickness and Edge Exclusion _Jinwoo Park, Cheolmin Shin, Hongyi Qin, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Ki Min, Taesung Kim  (Poster Presentation)

--- Optimization of CO2 bubbling (Carbonation) for post CMP Cleaning Process _Minho Hong, Taesung Kim (Poster Presentation)

--- Characterization of Pad Property Change for Using Different Conditioners _Cheolmin Shin, Seokjun Hong, Sanghuck Jeon, Hongyi Qin, Taesung Kim (Poster Presentation)

--- Friction Monitoring of Conventional Diamond Conditioner and Its Application _Hojoong Kim, Donghyun Lim, Byungil Lee, Hasub Hwang, Taesung Kim (Poster Presentation)

2. 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS) _Milano, Italy (Aug. 25-Aug. 29)

--- Development of an Integrated Optical Contact Force Monitoring Sensor for Cardiac Ablation Catheters _Jang Ah Kim, Changmin Kim, Kihong Park, Atul Kulkarni, Taesung Kim  (Poster Presentation)

--- Photoelectric Properties in Metal Ion Modified DNA Nanostructure _Atul KulkarniSreekantha Reddy Dugasani, JangAh Kim, HyeongU Kim, Sungha Park, Taesung Kim (Poster Presentation)

--- Electrochemical Biosensor based on MoS2-Graphene and IgG-HRP/ALP Nanocomposite _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Poster Presentation)

1. 9th Asian Aerosol Conference _Kanazawa, Japan (Jun. 24-Jun. 27)

--- Investigation of Nano Particles Characteristics Using PCDS _Dongbin Kim, Jihun Mun, HyeongU Kim, JuYoung Yun, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Electric field assisted ultrasonic atomizer for size controlled nanoparticles generation _Sooyhun Ha, Taehyun Hwang, Taesung Kim (Poster Presentation)

--- A Characterization Study of Collimated Particle Beam by Iris Type Lens _Myungjoon Kim, Youngseok Kim, Hongyi Qin, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Development of wet cyclone for bioaerosol sampling _Giwoon Sung, Woengyu Shin, Taesung Kim (Poster Presentation)


2014

7. International Conference on Planarization/CMP Technology (ICPT) 2014 _Kobe, Japan (Nov. 19-Nov. 21)

--- Evaluation of POU filter performance and it's effect on the polishing process _Sunjae Jang, Chulmin Shin, Hongyin Qin, Jichul Yang, Taesung Kim (Oral Presentation)

---Characteristic of Pad Cut Rate as Conditioner Structure _Cheolmin Shin, Sunjae Jang, Hongyi Qin, Jichul Yang, Taesung Kim (Poster Presentation)

6. IEEE Sensors 2014 _Valencia, Spain (Nov. 2-Nov. 5)

--- GLUCOSE WAVEGUIDE SENSOR BASED ON GRAPHENE _Taehyun Hwang, Jang Ah Kim (Poster Presentation)

---FUNCTIONAL GRAPHENE COMPOSITE FILMS FOR SURFACE PLASMON RESONANCE SENSOR TECHNOLOGY _Jang Ah Kim, Taehyun Hwang, Sreekantha Reddy Dugasani, Atul Kulkarni, Sung Ha Park, Taesung Kim (Poster Presentation)

5. 226th ECS Meeting _Cancun, Mexico (Oct. 5-Oct. 9)

--- A Metal-Ion Adsorbent Based on Composite of Graphene Oxide/Poly (1-(3-aminopropyl) Pyrrole) _Hongyi Qin, Tao Gong, Yujin Cho, Changgu Lee, Taesung Kim (Oral Presentation)

---Layered MoS2 based Electrochemical Biosensor _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Oral Presentation)

---Real-Time FET-Based Biosensor Using the Wet Cyclone Air Sampler _ Giwoon Sung, Chisung Ahn, Taesung Kim (Oral Presentation)

---Synthesis of MoS2 Thin Film _Jihun Mun, Dongbin Kim, Younghyeon Shin, Juyoung Yun, Sangwoo Kang, Taesung Kim (Oral Presentation)

4. International Symposium on Ultra Clean Processing of Semiconductor Surfaces _Brussels, Belgium (Sep. 21-Sep. 24)

--- Surface cleaning of graphene by CO2 cluster _Hoomi Choi, Jang Ah Kim, Yujin Cho, Taehyun Hwang, Jonwoo Lee, Taesung Kim (Oral Presentation)

---Retardation phenomenon of oxide removal during the formation dual gate oxide via PR-mask wet etching _Kihyung Ko, Myung Geun Song, Byung Kwon Cho, Bo Un Yoon, Yujin Cho, Taesung Kim (Oral Presentation)

---Effect of DI-water dilution and etchant arm movement on spinning type wet etch _ Huihwan Lee, Dukmin Lim, Taesung Kim (Oral Presentation)

---Effect of nozzle distance and fluid flow rate in jet spray wafer cleaning process _Kwangmin Seo, Daeheon Kim, Yujin Cho, Taesung Kim (Oral Presentation)

3. 2014 International Aerosol Conference _Busan, Korea (Aug. 28-Sep. 2)

--- A Novel Method for Generation of Size Controlled Nanoparticles _Soohyun Ha (Oral Presentation)

---CFD for fly ash transportation in a slope type system _Yeongseok Kim (Oral Presentation)

---Iris Diaphragm Type Aerodynamic Lenses _ Myungjoon Kim (Poster Presentation)

2. 5th International Conference on Nanotechnology: Fundamentals and Applications _Prague, Czech Republic (August 11-13)

---Development of Aperture Changeable Aerodynamic Lenses for Nanoparticle Focusing in Wide-range Conditions _Myungjoon KimHyeongU Kim, Sangwoo Kang, Taesung Kim (Oral Presentation)

---Investigation of Particle Characteristics Using Array Faraday Cup Installed PCDs _Dongbin Kim, Jihun Mun, HyeongU Kim, Sangwoo Kang, Taesung Kim (Oral Presentation)

--- Electric Filed Assisted Ultrasonic Spray for Size Controlled Nanoparticles Generation _Soohyun HaBaekhoon Seong, Taehyun Hwang, Doyoung Byun, Taesung Kim (Oral Presentation)

---Method to Measure the Seebeck Coefficient of Thermoelectric Thin Film for Energy Generation _Yeongseok KimSangwoo Kang, Soohyun Ha, Taesung Kim (Oral Presentation)

1. The 7th Asian Conference on Refrigeration and Air Conditioning _Jeju, Korea (May 18-21)

---Novel environmental monitoring sensor technologies with fiber optics and various sensing layers _Jang Ah Kim (Oral Presentation)

---Optical monitoring of radon aerosols at building construction sites _Soohyun Ha (Oral Presentation)


2013

10. 8th Asian Aerosol Conference _Sydney, Australian (December 02-05)

---In-situ size measurement and analysis of particles in vacuum condition using minimized PBMS _Dongbin Kim (Oral Presentation)

---Numerical performance simulation of aerosol sampler _Giwoon Sung (Oral Presentation)

---Numerical analysis of diaphragm type aerodynamic lenses _Myungjoon Kim (Oral Presentation)

---Modeling of silicone nanoparticles synthesis considered particle charging in ICP type silane plasma reator _Yeong Seok Kim (Poster Presentation)

9. The 1st International Conference on Surface Engineering _Busan, Korea (November 18-21)

---Surface conditioning of graphene by using CO2 gas cluster jet _Taesung Kim

8. International Conference on Planarization/CMP Technology _Hsinchu, Taiwan (Oct 30- Nov 01)

---Experimental study on high compressibility pad for ceria-based poly-stopping CMP _Dongwon Oh (Oral Presentation)

---A novel polystyrene-SiO2 composite nanoparticle for CMP slurry _Hongyi Qin (Oral Presentation)

---A study on the shape of abrasive pattern on CMP conditioner and their effect on coefficient of friction _Cheolmin Shin (Poster Presentation)

---Investigation on Ceria abrasive particles size distribution below wafer by type of polishing pad _Seunghun Bae (Poster Presentation)

---Study on point-of-use filter filtration effeiciency and it's effect on the polishing process _Sunjae Jang (Poster Presentation)

7. 224th ECS Meeting _San Francisco, USA (Oct 27-Nov 01)

---Surface cleaning using CO2 gas cluster for semiconductor device _Yujin Cho (Oral Presentation)

---Synthesis of MoS2 atomic layers with PECVE _HyeongU Kim (Oral Presentation)

---Chemical vapor deposition of MoS2 films _Jihun Mun (Oral Presentation)

---A study on the removal method of Si residue during Si wet etch _Kihyung Ko (Oral Presentation)

6. 3rd International Conference of Saving Energy in Refrigeration and Air-Conditioning _Yeosu, Korea (October 23-25)

---Numerical performance simulation of aerosol sampling _Giwoon Sung (Oral Presentation)

---The synthesis novel polystyrene-SiO2 composite abrasive for CMP slurry _Hongyi Qin (Oral Presentation)

5. The 9th Asian-European International Conference on Plasma Surface Engineering _Jeju, Korea (August 25-30)

---Synthesis of a few layers MoS2 by PECVD _HyeongU Kim (Oral Presentation)

4. Nano Korea 2013 _Seoul, Korea (July 10-12)

---Graphene surface treatment by using CO2 cluster jet _Jang Ah Kim (Oral Presentation)

3. International Forum on Functional Materials _Jeju, Korea (June 27-29)

---Real-time FET based biosensor using air sampler _Chisung Ahn (Oral Presentation)

---Modeling of silicone nanoparticle synthesis in silane plasma reactor _Youngseok Kim (Oral Presentation)

2. 3rd International Conference on Bio-sensing Technology _Sitges, Spain (May 13-15)

---Synthesis of tree-like silicon nanowire grown along the low surface energy direction for biosensor application _Chisung Ahn (Oral Presentation)

---Detection of ligand-receptor binding with graphene coated wavelength-modulated SPR sensor _Jang Ah Kim (Poster Presentation)

---Glucose-sensor combined graphene as photo detecotor with waveguide _Taehyun Hwang (Poster Presentation) 

1. China Semiconductor Technology International Conference _Shanghai, China (March 16-17)

---The Synthesis of novel polystyrene-SiO2 composite abrasive for CMP Slurry _Hongyi Qin (Oral Presentation)


Analysis of Pad Surface Change Using the Optical Sensor in Real Time
Analysis of Pad Surface Change Using the Optical Sensor in Real Time