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  • 1998-2010

Publication

1998-2010

 

 

43. Hoomi Choi, Kwangsu Kim, Heesung choi, Sangwoo Kang, Juyoung Yun, Yonghyeon Shin, Taesung kim, Plasma resistant aluminum oxide coatings for semiconductor processing apparatus by atmospheric aerosol spray methodSurface & Coatings Technology205, Supplement1, S125-S128, 2010

42. Jae Ho Cho, Atul Kulkarni, Hojoong Kim, Jin Uk Yoon, Jae Hyuck Sung, Il Je Yu, Taesung kim, "Numerical study on spatial distribution of silver nanoparticles inside whole-body type inhalation toxicity chamber", Journal of Mechanical Science and Technology24, 11, 2215-2220, 2010

41. Ji Chul Yang, Joo Hoon Choi, Taewook Hwang, Chil-Gee Lee, Taesung kim, “Effects of diamond size of CMP conditioner on wafer removal rates and defects for solid (non-porous) CMP pad with micro-holes”, INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE50, 10, 860-868, 2010

40. Kwangsu Kim, Jin-Hwan Park, Seok-Gwang Doo, Taesung kim, “Effect of oxidation on Li-ion secondary battery with non-stoichiometric silicon oxide (SiOx) nanoparticles generated in cold plasma”, Thin Solid Films518, 22, 6547-6549, 2010

39. Atul Kulkarni, Jun-Ho Lee, Jae-Do Nam, Taesung kim, "Thin film-coated plastic optical fiber probe for aerosol chemical sensing applications", Sensor and Actuatuors B - Chemical150, 154-159, 2010 

38. Joonsuk Oh, Jun-Ho Lee, Ja Choon Koo, Hyouk Ryeol Choi, Youngkwan Lee, Taesung kim, Nguyen Dang Luong and Jae-Do Nam, "Graphene oxide porous paper from amine-functionalizaed poly(glycidyl methacrylate)graphene oxide core-shell microspheres", Journal of Materials Chemistry, 20,9200-9240, 2010

37. Mingwen Hu, Sharad Raj, Byung Kim, Wing Kam Liu, Seunghyun Baik, Taesung kim, Byeong-Soo Lim and Moon Ki Kim, "Precise spring constant assignment in elastic network model for identification of vibration frequency and modeshapeJournal of Mechanical Science and Technology24, 9, 1-10, 2010

36. Jeonggil Na, Taesung kim, Jae-Boong Choi, Young-Jin Kim, Yong-Hyeon Shin, Ju-Young Yun, and Sang-Woo Kang, "Effects of Process Variables on TiN Particle Formation during Metallorganic Chemical Vapor Deposition", Electochemical and Solid-State Letters13, 7, H248-H252, 2010

35. Atul Kulkarni, Hyeongkeun Kim, Jaeboong Choi, and Taesung kim, “A novel approach to use of elastomer for monitoring of pressure using plastic optical fiber”, Review of Scientific Instruments81, 045108, 2010

34. Youngki Ahn, Donghyun Yoo, Jichul Yang, Jaewon Min, Jeongin Kim, Heemyung Lee, Atul Kulkarni, Taesung kim, “Damage-Free Design of a Megasonic Waveguide for Single-Wafer Processing”, Electrochemical and Solid-State Letters13, 6, H222-H226, 2010

33. Ji Chul Yang, Dong Won Oh, Ho Joong Kim, Taesung kim, “Investigation on Surface Hardening of Polyurethane Pads During Chemical Mechanical Polishing(CMP)”, Journal of Electronic materials39, 3, 338-346, 2010

 

32. Hojoong Kim, Ji Chul Yang, Taesung kim, “Measurement of CMP Slurry Abrasive Size Distribution by Scanning Mobility Particle Sizer”, Electrochemical and Solid-State Letters13, 4, H137-H140, 2010

31. Ji Chul Yang, Ho-joong Kim, Taesung kim, “Study of Polishing Characteristics of Monodisperse Ceria Abrasive in Chemical Mechanical Planarization, Journal of The Electrochemical Society157, 3, H235-H240, 2010

30. Ji Chul Yang, Dong Won Oh, Gae Won Lee, Chang Lyung Song, Taesung kim, “Step height removal mechanism of chemical mechanical planarization (CMP) for sub-nano-surface finish”, Wear268, 505-510, 2010

 

2009

29. Gyu-Sun Lee, Yun-Ha Shin, Ji-Man Kim, Tae-Sung Kim, and Young-Ze Lee, “Frictional Characteristics of Nano-Scale Mesoporous SiO2 Thin Film Formed by Sol-Gel and Self-Assembly Method”, Journal of Nanoscience and Nanotechnology9, 12, 7340-7344, 2009

28. Sang Hwa Yoon. Jun Ho Lee, Pyoung Chan Lee and Jae Do Nam, Hyun-Chul Jung and Yong Soo Oh, Tae Sung Kim, Young kwan Lee, “sintering and consolidation of silver nanoparticles printed on polyimide substrate films”, Macromolecular Research17, 8, 568-574, 2009

27. Younghyun Cho, Kwangsu Kim, Jaeho Cho, Jinhwan Park, Seokgwang Doo, Taesung kim, “Gas-Phase Synthesis of Silicon Nanoparticles and Mixing with Graphite Powders by Using Counter-Flow Injection”, Japanese Journal of Applied Physics48, 08HH02-1~5, 2009

26. Daekwang Woo, Jaejung Seo, Taesung kim, “NUMERICAL SIMULATION OF Si NANOPARTICLE FORMATION BY SILANE PYROLYSIS”, NANO4, 2, 107-117, 2009

25. Jeonggil Na, Taesung kim, Jae-Boong Choi, Ju-Young Yun, Yong-Hyeon Shin, and Sang-Woo Kang, “Real-Time Diagnosis of Nano-Sized Contaminant Particles Generated in TiN Metal Organic Chemical Vapor Deposition”, Applied Physics Express2, 35501, 2009

24. Kim, Kwangsu; Park, Jinhwan; Doo, Seokgwang; Nam, Jaedo; Kim, Taesung, “Manufacturing of size controlled a-Si:H nanoparticles in plasma using pulsed hydrogen gas”, Journal of Nanoscience and Nanotechnology9, 12, 7314-7317, 2009

23. Kwangsu Kim, Jin-Hwan Park, Seok-Gwang Doo, Jae-Do Nam, Taesung kim, “Generation of size and structure controlled Si nanoparticles using pulse plasma for energy devices”, Thin Solid Films517, 4184-4187, 2009

22. Kwangsu Kim, Daekwang Woo, Jin-Hwan Park, Seok-Gwang Doo, Taesung kim, “Formation of Silicon Nanoparticles Using SiH4 Pyrolysis at Atmospheric and Low Pressure”, Journal of Korean Physical Society54, 3, 1021-1026, 2009

21. Younggil Kim, AtulKulkarni, KisooJeon, JinukYoon, SangwooKang, JuyoungYun, Yonghyeon Shin, TaesungKim, “Evaluation of an optical particle sensor to determine the effect of nozzle shape on counting efficiency”, Journal of Aerosol Science40, 469-476, 2009

20. Hojoong Kim, Daekwang Woo, Ji Hun Kim, Young Ze Lee, Atul Kulkarni, Taesung kim, Min Suk Kang, Jeong Kuk Shon and Ji Man Kim, “Frictional characteristics of nanopoorus SiO2 film with treated surface by chemical mechanical polishing”, Journal of Korean Physical Society54, 3, 1247-1251, 2009

19. Atul Kulkarni, Jeonggil Na, Youngjin Kim, and Taesung kim, “The Plastic Optical Fiber Cantilever Beam As A Force Sensor”, Microwave and Optical Technology Letters51, 4, 1020-1023, 2009

18. Atul Kulkarni, Jeonggil Na, Young Jin Kim, Seunghyun Baik, Taesung kim, “An evaluation of the optical fiber beam as a force sensor”, Optical Fiber Technology15, 2, 131-135, 2009

 

2008

17. Ju-Young Yun, Soo-Won Heo, Sang-Woo Kang, Jeong-Gil Na, Young-Jae Park, Yong-Hyeon Shin, Ji-Hoon Lee, Tae-Sung Kim and Doo-Kyung Moon, “A study on the real-time decomposition monitoring of a metal organic precursor for metal organic chemical vapor deposition processes”, Measurement Science & Technology20, 025701, 2008

16. Atul Kulkarni, Young-Jin Kim and Taesung kim, “A novel approach towards sensing of liquid density using a plastic optical fibre cantilever beamPhysics Education44, 1, 64-69, 2008

15. Pyoung-Chan Lee, Tai-Hoon Han, Dong Ouk Kim, Jun-Ho Lee, Soo-Jung Kang, Chan-Hwa Chung, Youngkwan Lee, Sung M. Cho, Hoo-Gon Choi, Taesung kim, Eunsook Lee and Jae-Do Nam, “In-situ Formation of Platinum Nanoparticles in Nafion Recast Film for Catalyst-Incorporated Ion-Exchange Membrane in Fuel Cell Applications”, Journal of MembraneScience322, 2, 441-445, 2008

14. Hong SH, Lee SA, Nam JD, Lee YK, Kim TS, Won S, “Lung function changes in Sprague-Dawley rats after prolonged inhalation exposure to silver nanoparticles”, Inhalation Toxicology20, 6, 567-574, 2008

13. Seung-Hee Hong, Sun-Ae Lee, Young-Kwan Lee, Tae-Sung Kim, Sungho Won, and Jae-Do Nam, Platinum-Catalyzed and Ion-Selective Polystyrene Fibrous Membrane by Electrospinning and In-Situ Metallization TechniquesMacromolecularResearch16, 3, 204-211, 2008

12. Dae-Geun Cho, Jung-Gil Na, Jae-Boong Choi, Young-Jin Kim, and Taesung kim, Effect of Slip Boundary Condition on the Design of Nanoparticle Focusing Lenses”, Journal of Nanoscience and Nanotechnology, 8, 7, 3741-3748, 2008

11. Sehun Jung, Cheesung Lee, Atul Kulkarni, Kwangsu Kim, Taesung kim, Jaeboong Choi, Youngjin Kim, and Seunghyun Baik, “Single walled Carbon Nanotube Sensor Monitoring the Dissociation of Ar gasJournal of Nanoscience and Nanotechnology, 8, 10, 5118-5122, 2008

10. Dong Ouk Kim, Min Hye Lee, Jun Ho Lee, Tae-Woo Lee, Kwang Jin Kim, Young Kwan Lee, Taesung kim, Hyouk Ryeol Choi, Ja Choon Koo, Jae-Do Nam, “Transparent flexible conductor of poly(methyl methacrylate) containing highly-dispersed multiwalled carbon nanotube”, Organic Electronics9, 1, 1-13, 2008

 

 

1998-2007

9. Taesung kim, Jae-Boong Choi and Youngjin Kim, “Experimental Study of Nanoparticle Generation During High-Density Plasma Chemical Vapor Deposition of Poly Silicon films”, Journal of Korean Physical Society51, 3, 1187-1190, 2007

8. Taesung kim, S.K. Chae, “Application of Aerodynamic Lenses to In-Situ Particle Monitors(ISPM) for Higher Reliabilty in Semiconductor Fabrication Process”, Solid State Phenomena120, 273-278, 2007

7. O.C. Kwon, K.H. Lee, H.S. Ko, Taesung kim, “Stability limits of premixed methane-air microflames for micropower generation”, Key Engineering Materials326-328, part 2, 1133-1136, 2006

6. Taesung kim, H.S. Ko, O.C. Kwon, “Simulation assisted measurement of nanoparticle concentration generated during high-density plasma CVD of poly-silicon films”, Key Engineering Materials326-328, part 1, 349-352, 2006

5. H.S. Ko, S.S. Ahn, S.H. Baek, Taesung kim, “Development of combined optical system for thermal analysis of impinging flames”, Key Engineering Materials326-328, part 1, 71-74, 2006

4. R. M. Rassel, Taesung kim, Z. Shen, S. A. Campbell, P. H. McMurry, Electrical properties of SiO2 films with embedded nanoparticles formed by SiH4/O2 chemical vapor depositionJournal of vacuum science and technology B21, 6, 2441-2447, 2003

3. Z. Shen, Taesung kim, U. Kortshagen, P. H. McMurry, S. A. Campbell, Formation of highly uniform silicon nanoparticles in high density silane plasmasJournal of Applied Physics94, 4, 2277-2283, 2003

2. Taesung kim, S-M. Suh, S.L. Girshick, M. R. Zachariah, P. H. McMurry, R. M. Rassel, Z. Shen, S. A. Campbell, Particle formation during low-pressure chemical vapor deposition from silane and oxygen; Measurements, modeling, and film propertiesJournal of Vacuum Science and Technology A20, 2, 413-423, 2002

1. N. P. Rao, S. Nijhawan, Taesung kim, Z. Wu, S. Campbell, D. Kittelson, P. McMurry, C. Cheng, E. Mastromatteo, Investigation of particle generation during the low-pressure chemical vapor deposition of borophosphosilicate films”, Journal of the Electrochemical Society145, 6, 2051-2057, 1998