2019

 

               6.   2019 MRS Fall Meeting & Exhibit (2019 Materials Research Society) _Boston, USA (Dec.1-6)

                         ---Development of Aerosol Monitoring Technology for Monitoring Air Quality of Urban Area_Changmin Kim, Geunsang Park, Gunhoo Woo, Taesung Kim (Oral Presentation)

                       ---Wafer Scale Synthesis of MoS2-Graphene Heterostructure at Low Temperature and its HER Application_Kubra Aydin, Hyeong-U Kim, Vinit Kanade, Mans u Kim, Hyunho Seok, Changmin Kim, Dongmok Whang, Jae-Hyun Lee, Taesung Kim (Oral Presentation)

                        ---Large Scale and Low Temperature Synthesis of WS2 Using PECVD_Kanade Vinit, Hyeong-U Kim, Seokjun Hong, Chaitanya Kanade, Jae Hyun Lee, Taesung Kim (Poster Presentation)

              5.   2019 International conference on planarization/CMP technology (ICPT 2019) _Hsinchu, Taiwan (Sept.16-18)

                         ---Effects of Dispersants on Particle Size Distribution and Chemical Mechanical Polishing Process_Eungchul Kim, Jaewon Lee, Gunhoo Woo, Taesung Kim (Oral Presentation)

                        ---Investigation of Colloidal Silica Slurry with Mixed Particles of Different Sizes in Cu CMP_Juhwan Kim, Seokjun Hong, Chulwoo Bae and Taesung Kim (Oral Presentation)

                       ---Application of Scanning Mobility Particle Sizer for Measurement of Slurry Abrasive Size_Donggeon Kwak, Jinil Cho, Hyunho Seok, Taesung Kim (Oral Presentation)

                      ---Optimization of Water Polishing for an Improved Abrasive Removal_Seokjun Hong, Juhwan Kim, Johee Won, Vinit Kanade, Taesung Kim, Yutaka Wada, Satomi Hamada, Hirokuni Hiyama (Oral Presentation)

                      ---A Numerical Study on Slurry Flow with CMP Pad Grooves_Seokjun Hong, Johee Won, Hojoong Kim, Vinit Kanade, Taesung Kim (Oral Presentation)

                      ---Efficiency of Depth Filter for CMP slurry_Hyeseon Lee, Kubra Aydin, Taesung Kim, Joonseok Park, Sijeong Kim and Chihaeng Heo (Poster Presentation)

             4.   2019 MEMEA (Medical Measurements & Applications) _Istanbul, Turkey (Jun.26-28)

                         ---Development of a Wearable and Wireless Sensor for Monitoring Knee Posture based on Fiber Bragg Grating and Flexible Polymer_Dongjoo Shin, Eungchul Kim, Gunhoo Woo, Taesung Kim (Poster Presentation)

             3.   2019 IEEE International Workshop on Metrology for Industry 4.0 and IoT _Naples, Italy (Jun.04-06)

                        ---In-situ Monitoring Hydrodynamic Pressure Distribution during Chemical Mechanical Polishing_Eungchul Kim, Gunhoo Woo, Taesung Kim (Poster Presentation)

                        ---Development and Evaluation of Tri-Axial Fiber Bragg Grating in a Measurement Module for Catheterization_Dongjoo Shin, Hyeong-U Kim, Taesung Kim (Oral Presentation)

 

             2.   235th ECS Meeting  _Dallas, USA (May.26-30)

                       ---Synthesis of Nitrogen-Doped Molybdenum Sulphide and Molybdenum Sulphide/Oxide Nanocomposite As Active Materials for Supercapacitor Electrode_C.K.Kanade, V.K. Kanade, S. Hong, T.Kim (Oral Presentation)

                         ---Low Temperature Synthesis of WS2 Using PECVD for Hydrogen Evolution Catalysis_V.K. Kanade, H.U. Kim, C.K. Kanade, D. Shin, J.H. Lee, T.Kim (Oral Presentation)

                        ---Effects of Amino Acids on Silicon Oxide for High Silicon Oxide Removal Rate Ceria Slurry_Donggeon Kwak, T. Kim (Oral Presentation)

                       ---Prediction of Pad Wear Depending on Structural Factors of Diamond Conditioner_E. Kim, T. Kim (Oral Presentation)

             1.   2019 SPCC (The Surface Preparation and Cleaning Conference) _Portland, USA (Apr.2-3)

                       ---Study on Wet Etching of Dummy Poly-Si_Dongjoo Shin, Yerim Yeon, Kwangsu Kim, Younggi Ahn, Kubra Aydin, Taesung Kim (Poster Presentation)

                      ---Optimization of Water Polishing for an Improved Abrasive Removal_Seokjun Hong, Juhwan Kim, Johee Won, Taesung Kim (Poster Presentation)

                      ---Investigation of Ceria Abrasive Removal during Post Chemical Mechanical Polishing Cleaning_Juhwan Kim, Seokjun Hong, Vinit K.Kanade, Taesung Kim (Poster Presentation)

 

 

 

2018

             3.   2018 International Conference on Planarization/CMP Technology (ICPT 2018) _Seoul, Korea (Oct.14-17)

                       ---A method for size distribution measurement of sub-100nm colloidal silica   nanoparticles_Cheolmin Shin, Donggeon kwak,

                       Seungki Chae, Yinhua Jin and Taesung Kim (Poster Presentation)

 

 

                       ---Effects of Amino Acids for High Silicon Oxide Removal Rate_Donggeon Kwak, Cheolmin shin ,Vinit K. Kanade and Taesung

                       Kim (Poster Presentation)

                       ---Prediction of Pad Profile during Conditioning Process in Chemical Mechanical Polishing_Eungchul Kim, Chul Kang, Jichul

                       Yang, Yinhua Jin, and Taesung Kim (Poster Presentation)

 

                       ---Investigation of Abrasive Behavior during Water Polishing_Seokjun Hong, Juhwan Kim, Vinit K. Kanade, Taesung Kim, Wada

                       Yutaka, Hiyama Hirokuni and Satomi Hamada (Poster Presentation)

                      ---Investigation of Abrasive Removal during Post Chemical Mechanical Polishing Cleaning_Juhwan Kim, Seokjun Hong, Vinit K.

                       Kanade and Taesung Kim (Poster Presentation)

          2.  10th International Aerosol Conference (IAC 2018) _   Saint Louis,  US (Sept.02-07)

             ---Application of Particle aerosol technology to cmp process analysis_

          Taesung Kim, Cheolmin Shin, Seokjun Hong  (Poster Presentation)

         1.  2018 IEEE International Symposium on Medical Measurement & Applications (IEEE MEMEA)  _Rome, Italy (Jun.11-13)

            ---Development of Tri-axial Fiber Bragg Grating Force Sensor in Catheter Application_

          Hyeong- U Kim, Dongjoo Shin, Taesung Kim  (Oral Presentation)

 

2017

5.  2017 International Conference on Planarization/CMP Technology (ICPT 2017) _Leuven, Belgium (Oct.10-13)

 ---Modified Kinematic model for predicting contact points of conditioner in CMP_Jihye Choi, Cheolmin Shin, Yinhua Jin, Taesung Kim  (Oral Presentation)

 ---A reverse selectivity ceria slurry for silicon nitride removal during CMP_Cheolmin Shin, Seungchul Hong, Donggeon Kwak, Eungchul Kim, Taesung Kim (Oral Presentation)

 ---Study on hydrodynamic pressure distribution in chemical mechanical polishing_Eungchul Kim, Cheolmin Shin, Yinhua Jin, Taesung Kim (Poster Presentation)

 ---Evaluation of polyurethane pads properties for effective use in planarization process_Hyunjae Chung, Cheolmin Shin, Yinhua Jin, Taesung Kim (Poster Presentation)

 ---Control of silica particle deposition for fabrication of post cmp cleaning ability evaluation wafer_Younsun Cho, Seung-Ki Chae, Cheolmin Shin, Yinhua Jin, Taesung Kim (Poster Presentation)

 ---Prediction of cmp performance with slurry flow analysis on the pad surface_Seokjun Hong, Younsun Cho, Juhwan Kim, Yinhua Jin, Taesung Kim (Poster Presentation)

 ---The effect of chelating agent in TMAH based post Cu-CMP cleaning solution_Seongsik Jeon, Sanghyuk Jeon, Ahhyeon Lim, Sokho Yi, Taesung Kim (Poster Presentation)

 ---In-line real-time conductivity technique for monitoring of liquid chemical concentration during semiconductor manufacturing_Hong Jie, Atul Kulkarni, Hyeong-U Kim, Taesung Kim (Poster Presentation)

 ---Improvement of wafer edge profile by controlling a pad profile_Seokjoon Kim, Siyoung Kim, Taesung Kim (Poster Presentation)

 ---A reverse selectivity ceria slurry for silicon nitride removal during CMP_Hyunsu Lim, Youngse Lee, Taesung Kim (Poster Presentation)

 ---Development of novel cleaning solution for post chemical mechanical planariztion silicon wafer_Junghwan Shong, Na Han, Kihong Park, Sokho Yi, Taesung Kim (Poster Presentation)

 ---Study on defect control of CMP process caused by deposition process_Sungbin Lee, Sangyoon Shin, Taesung Kim (Poster Presentation)

 

4.  European Conference on Thermoelectrics (ECT 2017) _Padua, Italy (Sep.25-27)

 ---zT measurement system supporting two separated methods_Yeongseok Kim, Sangwoo Kang,Jae Yong Song , Hyeong U Kim, Taesung Kim  (Poster Presentation)

 ---Ceramic thick film formation for insulating layer by atmospheric aerosol spray_Yujin Cho, Yinhua Jin, Youngseok Kim, Taesung Kim (Poster Presentation)

 

3.  Eurosensors 2017 _Paris, France (Sep.3-6)

 ---Development and Evaluation of Tri-axial Fiber Bragg Grating Force Sensor for Catheter_Dongjoo Shin, Hyeong-U Kim, Atul Kulkarni, Taesung Kim  ( Oral Presentation)

 ---Low temperature synthesis of wafer-scale 2D materials for sensor applications_Hyeong-U Kim, Atul Kulkarni, Dongjoo Shin, Vinit Kanade, Minho Lee, Taesung Kim ( Oral Presentation)

 ---Formation of Crumpled Graphene for Flexible Strain Sensor_Yinhua Jin, Atul Kulkarni , Hyeong-U Kim, Seokjun Hong, Teasung Kim ( Oral Presentation)

 

 

2.  The 10th Asian Aerosol Conference (AAC 2017) _Jeju, Korea (July.2-6)

 ---Development of a Cyclone-Based Bioaerosol Sampler with Liquid Film_Giwoon Sung,Hyeong U Kim ,Jihye Choi ,Taesung Kim ( Oral Presentation)

 ---Development of Electric Field Assisted Megasonic Atomization for Generating Nanoparticles_Hyeong U Kim ,Vinit Kanade ,Atul Kulkarni, Soohyun Ha ,Dongjoo Shin,Taesung Kim ( Oral Presentation)

 ---Investigation of Process Mediated Particle Characteristics Using PBMS_Dongbin Kim ,Hyeongu Kim ,Ju-young Yun, Sang-woo Kang ,Taesung Kim ( Oral Presentation)

 

1. 2017 Asian Conference on Thermal Sciences (ACTS 2017) _Jeju, Korea (Mar.26-30)

 ---Cross-plane zt evalueation system_Yeongseok Kim ,Sang-Woo Kang ,Jae Yong Song ,Hyeong U Kim ,Taesung Kim ( Oral Presentation)

 

 

2016

4. 2016 International Conference on Planarization/CMP Technology (ICPT 2016) _Beijing, China (Oct.17-19)

 ---Effects of Oxidants on the Material Removal Rate in Oxide Chemical Mechanical         Polishing_Cheolmin Shin, Jinhak Choi, Sanghyuk Jeon, Taesung Kim (Poster Presentation)

--- Analysis of Pad Surface Change Using the Optical Sensor in Real Time_Seokjun Hong, Hyunjae Chung, Cheolmin Shin, Taesung Kim (Oral Presentation)

--- Study of Stress Distributions on the Wafer at the CMP Process Using Numerical and Experimental Methods_Jinwoo Park, Cheolmin Shin,  Hongyi Qin,Taesung Kim (Oral Presentation)

--- Effects of Slurry Additives under Acid Condition for 3D NAND gate Flash Memory_Sanghuck Jeon, Taesung Kim (Poster Presentation)

--- HLD CMP Screatch on Gate Last Process_Sungil Cho, Kyungil Cho, Jinwoo Kim, Taesung Kim (Poster Presentation)

---Effect of Slurry Additives on Material Removal Rate and Nanoscale Surface Uniformity of Cu Wafers During CMP_Sungjae Jang, Jung Hwan Song, Taesung Kim (Poster Presentation)

---Effect of Metal Ion Doping in Ceria Slurry for Chemical Mechanical Planarization_Jinhak Choi, Cheolmin Shin, Taesung Kim (Oral Presentation)

---Chemical Mechanical Planarization Filter Life-Cycle Enhancement Test through the Slurry Supply System_Sangyoon Shin, Horim Lee, Taesung Kim (Oral Presentation)

--- Development of Real-Time and Process Monitoring of Liquid Chemical Concentration during Semiconductor Manufacturing _Kihong Park, Atul Kulkarini, Taesung Kim (Oral Presentation)

3.  Uurosensors 2016 _budapest, Hungary (Aug. 4-7)

--- Fiber optic lateral coupling force sensor for biomedical applications _Jang Ah Kim, Atul Kulkarni, Changmin Kim, Kihong Park, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Hyeong-U Kim, Hye Youn Kim, Atul Kulkarni, ChISUNG Ahn, Mingu Kim, Min-Ho Lee, Taesung Kim  (Poster Presentation)

2. 20th International Vacuum Congress _Busan, Korea (Aug. 21-Aug. 26)

--- Fluid dynamic numerical analysis in graphene growth by chemical vapor deposition _Giwoon Sung, Yinhua Jin, Taesung Kim  (Poster Presentation)

--- The optimization of hydrogen sulfide plasma-etching endpoint in molybdenum sulfurization _Mingu Kim, Chisung Ahn, Juhyun Son, Taesung Kim  (Poster Presentation)

--- Preparation of high purity graphene quantum dots for bio imaging _Yinhua Jin, Hongyi Qin, Sun-young Kim, Yong Taik LIM, Taesung Kim (Oral Presentation)

--- Surface cleaning using CO2 gas cluster for semiconductor device _Yujin Cho, Hongyi Qin, Taesung Kim (Oral Presentation)

1. The 18th International Conference on Crystal Growth and Epitaxy _Nagoya, Japan (Aug. 7-Jun. 12)

--- Synthesis of Wafer Scale Molybdenum Oxide (MoO3) using PECVD for flexible Gas Sensor Application _J. Son, C. Ahn, H.-U Kim, G. Park, G. kim, H. Sin, T. Kim (Oral Presentation)

--- Graphene quantum dots prepared from graphene hydrogels _H.Y. Qin, Y.H. Jin, Y.J. Cho, C.M. Shin, C.G. Lee, T.S. Kim (Oral Presentation)

 

2015

4. 228th ECS Meeting _Phoenix, USA (Oct. 11-Oct. 15)

--- Graphene Quantum Dots Prepared from Graphene Hydrogels Basing on Hydrothermal Method _Hongyi Qin, Tao Gong, Jinglin Liu, Yujin Cho, Cheolmin Shin, Changu Lee, Taesung Kim  (Oral Presentation)

--- Dry Electrochemical Etching of MoS 2 Thin Films Using Plasma System _Chisung Ahn, M.H.Jeon, H.U. Kim, K.N. Kim, H. Qin, Y. Kim, G.Y. Yeom, T. Kim  (Oral Presentation)

--- Sensor Units to Measure Multi-Direction Seebeck Coefficient of Micro-Scale Film _Yeongseok Kim, SangWoo Kang, HyeongU Kim, Taesung Kim (Poster Presentation)

3. 2015 International Conference on Planarization/CMP Technology (ICPT) _Chandler, USA (Sep. 30-Oct. 02)

--- Optimal Shape of Retainer Ring Considering Slurry Film Thickness and Edge Exclusion _Jinwoo Park, Cheolmin Shin, Hongyi Qin, Taesung Kim  (Oral Presentation)

--- Study on Effect of Back-surface Treatment of Silicon Wafer in Photo Lithography Process after CMP Process _Ki Min, Taesung Kim  (Poster Presentation)

--- Optimization of CO2 bubbling (Carbonation) for post CMP Cleaning Process _Minho Hong, Taesung Kim (Poster Presentation)

--- Characterization of Pad Property Change for Using Different Conditioners _Cheolmin Shin, Seokjun Hong, Sanghuck Jeon, Hongyi Qin, Taesung Kim (Poster Presentation)

--- Friction Monitoring of Conventional Diamond Conditioner and Its Application _Hojoong Kim, Donghyun Lim, Byungil Lee, Hasub Hwang, Taesung Kim (Poster Presentation)

2. 37th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBS) _Milano, Italy (Aug. 25-Aug. 29)

--- Development of an Integrated Optical Contact Force Monitoring Sensor for Cardiac Ablation Catheters _Jang Ah Kim, Changmin Kim, Kihong Park, Atul Kulkarni, Taesung Kim  (Poster Presentation)

--- Photoelectric Properties in Metal Ion Modified DNA Nanostructure _Atul Kulkarni, Sreekantha Reddy Dugasani, JangAh Kim, HyeongU Kim, Sungha Park, Taesung Kim (Poster Presentation)

--- Electrochemical Biosensor based on MoS2-Graphene and IgG-HRP/ALP Nanocomposite _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Poster Presentation)

1. 9th Asian Aerosol Conference _Kanazawa, Japan (Jun. 24-Jun. 27)

--- Investigation of Nano Particles Characteristics Using PCDS _Dongbin Kim, Jihun Mun, HyeongU Kim, JuYoung Yun, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Electric field assisted ultrasonic atomizer for size controlled nanoparticles generation _Sooyhun Ha, Taehyun Hwang, Taesung Kim (Poster Presentation)

--- A Characterization Study of Collimated Particle Beam by Iris Type Lens _Myungjoon Kim, Youngseok Kim, Hongyi Qin, Sangwoo Kang, Taesung Kim (Poster Presentation)

--- Development of wet cyclone for bioaerosol sampling _Giwoon Sung, Woengyu Shin, Taesung Kim (Poster Presentation)

 

2014

7. International Conference on Planarization/CMP Technology (ICPT) 2014 _Kobe, Japan (Nov. 19-Nov. 21)

--- Evaluation of POU filter performance and it's effect on the polishing process _Sunjae Jang, Chulmin Shin, Hongyin Qin, Jichul Yang, Taesung Kim (Oral Presentation)

---Characteristic of Pad Cut Rate as Conditioner Structure _Cheolmin Shin, Sunjae Jang, Hongyi Qin, Jichul Yang, Taesung Kim (Poster Presentation)

6. IEEE Sensors 2014 _Valencia, Spain (Nov. 2-Nov. 5)

--- GLUCOSE WAVEGUIDE SENSOR BASED ON GRAPHENE _Taehyun Hwang, Jang Ah Kim (Poster Presentation)

---FUNCTIONAL GRAPHENE COMPOSITE FILMS FOR SURFACE PLASMON RESONANCE SENSOR TECHNOLOGY _Jang Ah Kim, Taehyun Hwang, Sreekantha Reddy Dugasani, Atul Kulkarni, Sung Ha Park, Taesung Kim (Poster Presentation)

5. 226th ECS Meeting _Cancun, Mexico (Oct. 5-Oct. 9)

--- A Metal-Ion Adsorbent Based on Composite of Graphene Oxide/Poly (1-(3-aminopropyl) Pyrrole) _Hongyi Qin, Tao Gong, Yujin Cho, Changgu Lee, Taesung Kim (Oral Presentation)

---Layered MoS2 based Electrochemical Biosensor _HyeongU Kim, Hyeyoun Kim, Chisung Ahn, Atul Kulkarni, Minho Lee, Taesung Kim (Oral Presentation)

---Real-Time FET-Based Biosensor Using the Wet Cyclone Air Sampler _ Giwoon Sung, Chisung Ahn, Taesung Kim (Oral Presentation)

---Synthesis of MoS2 Thin Film _Jihun Mun, Dongbin Kim, Younghyeon Shin, Juyoung Yun, Sangwoo Kang, Taesung Kim (Oral Presentation)

4. International Symposium on Ultra Clean Processing of Semiconductor Surfaces _Brussels, Belgium (Sep. 21-Sep. 24)

--- Surface cleaning of graphene by CO2 cluster _Hoomi Choi, Jang Ah Kim, Yujin Cho, Taehyun Hwang, Jonwoo Lee, Taesung Kim (Oral Presentation)

---Retardation phenomenon of oxide removal during the formation dual gate oxide via PR-mask wet etching _Kihyung Ko, Myung Geun Song, Byung Kwon Cho, Bo Un Yoon, Yujin Cho, Taesung Kim (Oral Presentation)

---Effect of DI-water dilution and etchant arm movement on spinning type wet etch _ Huihwan Lee, Dukmin Lim, Taesung Kim (Oral Presentation)