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Research Professor (7)

 

Dr. Sudheer Kumar Shukla

 - Waste water treatment and recycling                                                   

 - Membrane separation process

 - Environmental impact assessment

 - Air quality/pollution assessment

Dr. Dinesh Amalnerkar

Post doc. Hanyang University

Publication

Prof. Atul Kullkarni

Professor and Director

Symbiosis Centre for Nanoscience and Nanotechnology (SCNN)

Symbiosis International University

 Publication

 

Dr. Sangjun Lee

Dr. Nilam Qureshi

Dr. Dongbin Kim

 Post doc. University of Minnesota

 Post doc. 국토교통과학기술진흥원

LG display

Dr. Hyeong-U Kim

KIMM (Korea Institute of Machinery & Materials)

 

 

Ph.D (47)

 

 

Kwangsu Kim (SAINT)

 

 Graduation Paper (2010)

 - Synthesis of silicon and silicon suboxide nanoparticle using inductively coupled plasma and its applications 

 대림대학교 Professor

 

 Jichul Yang (SSIT)

 

Graduation Paper (2011)

 - A study of Nano-ceria slurry chemical mechanical planarization

 (전) SK HYNIX (메모리 파트 CMP 임원)

 (현) EBARA  Vice President (Global Tech. Research & Marketing)

 

Daekwang Woo (ME) (2008-03.2013.02)

 

 Graduation Paper (2013)

 - A study on the emission characteristics and on-road spatial distribution of ultrafine particles from vehicles in atmospheric environment

 SAMSUNG Semiconductor  (삼성반도체) 

 

Hoomi Choi (SAINT) (2009.03-2013.02)

 

 Graduation Paper (2013) 

 - A study on CO2 gas cluster generation and its application to contamination control in surface processing

 SAMSUNG Semiconductor  (삼성반도체)

 

Hojoong Kim (SAINT) (2007.03-2013.02)

 

 Graduation Paper (2013) 

 - A study on dynamic interactions of slurry and nano abrasive in chemical mechanical planarization process

 SAMSUNG Semiconductor  (삼성반도체)

 

Youngki Ahn (ME) (2008.03-2015.02)

 

 Graduation Paper (2014) 

 - A study on the single-wafer physical cleaning to reduce pattern damage 

 대림대학교 Professor

 

Jihun Mun (SAINT) (2008.03-2015.08)

 

Graduation Paper (2015) 

 - Low Temperature Synthesis of Molybdenum Disulfide Atomic Layer

 KRISS (Korea Research Institute of Standards and Science)

 

Chisung Ahn (SAINT) (2010.03-2016.02)

 

 Graduation Paper (2015) 

 - Low temperature Synthesis and Layer Control of MoS2 thin film by plasma process 

KITECH (Korea Institute of Industrial Technology)

Hongyi Qin (SAINT) (2012.08-2016.08)

 

Graduation Paper (2016)

-Development and Application of Graphene Derivatives for Water Treatment and Sensors 

Huawei (화웨이)

 

Soohyun Ha (SAINT) (2009.03-2017.02)

 

Graduation Paper (2017) 

 -A study on the Mass production of charged aerosol using electric field assisted atmization

SAMSUNG Semiconductor  (삼성반도체) 

 

Myungjun Kim (M.E) (2009.03-2017.02)

 

Graduation Paper (2017) 

 -A study on Collimated Particle Beam Generation  

SAMSUNG Semiconductor (삼성반도체)

 

Jangah Kim (SAINT) (2011.03-2017.02)

 

Graduation Paper (2017) 

 - Development of optical fiber sensors for biomedical and biochemical applications

Post doc. Imperial College London


 

Sunjae Jang (M.E) (2011.03-2017.02)

 

Graduation Paper (2017) 

 - A study on the Effect of Slurry Characteristics in chemical mechanical planarization process 

Samsung electronics (반도체연구소)

 

Junggil Na (M.E)

 

 JJ CONSULTING & SOLUTIONS

 

Giwoon Sung (M.E) (2011.03-2018.02)

 

Graduation Paper (2018)

-Study on Fine Atmospheric Aerosols Sampling and Concentration

Samsung Display (삼성 디스플레이)

 

Youngseok Kim (M.E) (2012.09-2018.08)

 

Graduation Paper (2018) 

-Development of multi-direction thermoelectric property measurement system

Samsung Electronics

Dr. Dongbin Kim (ME) (2011.03-2018.02)
 
Graduation paper (2018)
-(A) study on the development of real-time particle analyzing apparatus and the PECVD process diagnosis
Post doc. University of Minnesota
 Post doc. 국토교통과학기술진흥원
LG display

 

Hyeong-U Kim (SAINT) (2013.03-2019.02)

 

Graduation Paper (2019)

-Large Scale Synthesis of Different Phase MoS2 and its Heterostructure using Plasma Enhanced CVD for Electrochemical Applications

Post Doc. Northwestern University

 

Cheolmin Shin (M.E) (2013.03-2019.02)

 

Graduation Paper (2019)

-A Study on Physico-Chemical Interaction in CMP Tribology

SK HYNIX

 

Yinhua Jin (SAINT) (2014.09-2019.02)

 

Graduation Paper (2019)

-Chemical Functionalization of Graphene Oxide and Graphene Quantum Dots for Urnium Adsorption and Bio-imaging 

SEMES

 

Yongil Lee (M.E) (2014.03-2019.02)

 

Graduation Paper (2019)

-Generation Characteristics of Airborne Wear Particles in Subway Operation

Korea Railroad Research Institute (KRRI)

 

Yujin Cho (M.E)  (2011.09-2020.02)

 

Graduation Paper (2020)

-A Study of Aerosol Behavior in Supersonic Nozzle and Its Application to Semiconductor Cleaning and Film Deposition

SEMES


 

Seokjun Hong  (M.E)  (2017.03-2021.02)

 

Graduation Paper (2021)

- A Study on Slurry Flow and Abrasive Behavior in CMP and Post-CMP Cleaning

 Samsung Electronics

Kyungho Hwang (ME) (2018.09 -2021.12)

 

Graduation paper (2021)

-A Study on Relative Motion of Rotary Type Chemical and Mechanical Polishing

SK HYNIX

Chaitanya Kanade (SAINT) (2018.09-2022.09)

 

Graduation paper (2022)

-Low Temperature Synthesis of MoS2 and WS2 Heterostructures using Plasma Enhanced Chemical Vapor Deposition and Their Applications

Centre for Materials for Electronic Technology, Pune (C-MET, Pune)

Changmin Kim (ME) (2019.02 - 2023.02) 

 

Graduation paper (2023)

-The Experimental and Numerical Study on the Plasma Etching Process of
Two-dimensional MoS2

 KIMM Post Doc.

Juhwan Kim (ME) (2017.02-2023.02)  

 

Graduation paper (2023)

-Study on the Effects of Slurry Properties on Cu Chemical Mechanical Planarization

Samsung Electronics

Donggeon Kwak (ME) (2017.02-2023.02) 

 

Graduation paper (2023)

-Study on the Size Distribution Measurement of Slurry Abrasive with Aerosol-based Analysis in Chemical Mechanical Planarization

Samsung Electronics

Eungchul Kim (ME) (2017.02-2023.02)  

 

Graduation paper (2023)

-Mechano-electrochemical interface reaction of silica and ceria abrasives during chemical mechanical polishing

Samsung Electronics

Dongjoo Shin (ME) (2017.02-2023.02)  

 

Graduation paper (2023)

-Development of wearable optical fiber sensors for human motion monitoring

Vinit Kanade (SAINT) (2017.02-2023.02) 

 

Graduation paper (2023)

Low-temperature and wafer-scale synthesis of 1T-WS2 and nitrogen-doped WS2 film using plasma enhanced CVD for hydrogen evolution catalysis

Inkoo Lee (ME) (2019.2-2023.7)

 

Graduation paper (2023)

High efficient hydrogen evolution reaction of transition metal dichalcogenide(TMDc) synthesised with plasma enhanced CVD

Sanghuck Jeon (ME) (2020.2-2024.2)

 

Graduation paper (2023)

-Study on Pad Surface Engineering in Chemical Mechanical Planarization

Samsung Electronics

Sanghyeon Park (ME) (2016.2-2024.2)

 

Graduation paper (2023)

Development of a novel membrane process for post-CMP cleaning and a filtration for removal of large particles in CMP slurry

 

Kihong Park (ME) (2020.2-2024.8)

 

Graduation paper (2024)

- Investigation of Novel Wet Cleaning Solutions and Gas-Dissolved Water Effects on Ceria Nanoparticle Removal in Post-CMP Cleaning

Samsung Electronics

Kubra AYDIN (SAINT) (2018.8-2024.8)

 

Graduation paper (2024)

MoOx-based Heterostructure Coated with Non-metal Heteroatom-doped Graphene in an Acidic Environment to Enhance Hydrogen Evolution Reaction Performance

Samsung Electronics

Seungjun Oh (ME) (2018.8-2024.8)

 

Graduation paper (2024)

Study on the effect of particle-related characteristics in chemical mechanical planarization (CMP) and cleaning

Samsung Electronics

Jaeyeon Kim (ME) (2019.8-2024.8)

 

Graduation paper (2024)

-

Hyundai Automotive

Yonggyun Park (ME) (2020.2-2024.8)

 

Graduation paper (2024)

-

Wonik IPS

Seungjae Lee (ME) (2018.7-2025.2)

 

Graduation paper (2025)

Contaminant Particle Analysis and In-situ Process Diagnostics in the Semiconductor Manufacturing

SEMES research center

Hyunho Seok (SAINT) (2019.2-2025.2)

 

Graduation paper (2025)

- Reconfigurable Atomic-Scale Devices for Neuromorphic Computing

Massachusetts Institute of Technology (MIT), Postdoctoral Fellow

 

Jinill Cho (ME) (2019.2-2025.2)

 

Graduation paper (2025)

Samsung Electronics

Gunhoo Woo (SAINT) (2019.2-2025.2)

 

Graduation paper (2025)

Jaewon Lee (ME) (2019.2-2025.2)

 

Graduation paper (2025)

-A Study on Eco-Friendly  Modified Ceria and Silica Slurries for Chemical Mechanical Polishing

- Samsung Electronics

요징희 -  Chengxi Yao (ME)(2021.8-2025.8)

Graduation paper (2025)

-Numerical Modeling and Optimization of Particulate and Gaseous Contamination Control in Semiconductor Clean-room

-SiCarrier

류펑잔 - Pengzhan Liu (ME)(2019.8-2025.8)

Graduation paper (2025)

-Investigation of thermal effects in CMP and post CMP cleaning 

 

-Huawei

 

서장원 - Jangwon Seo (ME) (2020.8-2025.8)

 

 

Graduation paper (2025)

 

 

 

 

Master (77)

 

Kyungtag Nam (M.E)
 
Graduation Paper (2008)
-A Study on the evaluation method for 45 nm-level megasonic deaning system
STX Heavy Industry 

Myungjun Lee (M.E)
 
Graduation Paper (2008)
-Study of design technology on flow distribution of large scale membrane filtration facility.
Korea Water

Younggil Kim (M.E)
 
Graduation Paper (2008)
-A study on the effect of optical particle sensor chamber shape for higher counting efficiency
SAMSUNG Semiconductor
 

Daekwang Woo (SAINT) (2006.03-2008.02)
 
Graduation Paper (2008)
-A study on the emission characteristics of nanoparticles from vehicle exhaust
NPTL Ph.D course

Yonghyun Cho (SAINT)
 
Graduation Paper (2009)
-Gas-phase synthesis of silicon nanoparticles and mixing with graphite powders by using counter-flow injection
SAMSUNG Electronics

Jaeho Cho (SAINT)
 
Graduation Paper (2009)
-Numerical study of silver nanoparticle transport in the exposure chamber
HCT & NPTL Ph.D course

Hoomi Choi (M.E) (2007.03-2009.02)
 
Graduation Paper (2009)
-Film formation and application using atmospheric aerosol spray method
NPTL Ph.D course

Nguyen Thi Kieu Hanh (SAINT)
 
Graduation Paper (2009)
-Evaluation of chemical composition of aquatic nanoparticles and atmospheric aerosols
Nongnam University

Dukmin Ahn (SSIT)
 
Graduation Paper (2010)
-Effects of surface cleaning on the metal electrode of DRAM capacitor
SAMSUNG Semiconductor

Donghyun Yoo (M.E)
 
Graduation Paper (2010)
-Analysis for pattern damage reduction during megasonic cleaning
3M

Seyoung Kim (M.E)
 
Graduation Paper (2011)
-Experimental study of axial-flow cyclone in the air handing unit
DAP (디에이피)
 

Jaewon Min (SSIT)( -2010.12)

Graduation paper

-Comparison of Jet Spray and Megasonic Module for a Cleaning of Aluminum Layer Surface

SSIT 삼성반도체

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Myunghun Oh (SSIT)
 
Graduation Paper (2011)
-Investigation on Silicon Particle Generation during Dichlorosilane-Based WSi DepositionProcess
 
SSIT 삼성반도체

Kangjun Kim (SAINT) (2009.09-2011.07)
 
Graduation Paper (2011)
-Characterization of wear between polishing pads, conditioners, and wafers
Shinhan Diamond (신한다이아몬드)
 

Dongwoo Kim (M.E) (2009.09-2011.07)
 
Graduation Paper (2011)
-Improve the initial CMP performance with the modified surface roughness of CMP pad
The Dow Chemical Company
 

Hang Zhang (SAINT) (2009.09-2011.07)
 
Graduation Paper (2011)
-Development of bio-chem sensors based on optical and nano technology
SAMSUNG Electronics

Hongyi Qin (SAINT) (2010.09-2012.07)
 
Graduation Paper (2012)
-Synthesis of polypyrrole nanofilm and its study as optical fiber sensor
NPTL Ph.D course

Yang Xu (SAINT) (2011.09-2013.07)
 
Graduation Paper (2013)
-Development of Chem-Bio sensors based on optical fiber system and silicon nanowire array field effect transistor
SAMSUNG Electronics

Donghyun Lim  (SSIT) (2010.03-2012.02)
 
Graduation Paper (2012)
Study on the filtration effects in the ceria based chemical mechanical polishing(CMP)
Samsung Electronics

Dongwon Oh (M.E) (2013.03-2015.12)
 
Graduation Paper (2015)
-
SAMSUNG Semiconductor

Kihyung Ko (M.E) (2013.03-2016.12)
 
Graduation Paper (2015)
-
SAMSUNG Semiconductor

Kwangmin Seo (M.E) (2013.03-2016.02)
 
Graduation Paper (2015)
-
SAMSUNG Electronics
 

Huihwan Lee (M.E) (2014.03-2016.02)
 
Graduation Paper (2015)
-
SAMSUNG Electronics

Jinwoo Park (M.E) (2014.09-2016.08)
 
Graduation Paper (2016)
-Study on the stress distribution on the wafer during CMP process by numerical and experimental methods
SK Hynix

Sungjune Yang (M.E) (2015.03-2017.09)
 
Graduation Paper (2017)
-
SAMSUNG Electronics

Kihong Park (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-Development of Real-time and In-line process monitoring of liquid chemical concentration during semiconductor manufacturing
LTCAM

Sanghuck Jeon (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-Study on the CMP slurry additives for improving removal rate and selectivity of poly-Si and Si3N4 films under acidic condition
LTCAM

 

 

Jinhak Choi (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-Effect of ceria abrasive synthesized by supercritical hydrothermal method for chemical mechanical planarization
LTCAM

 

Juhyun Son (M.E) (2015.02-2017.02)
 
Graduation Paper (2017)
-Synthesis of wafer scale molybdenum oxide using plasma process and humidity sensor application
Parkor Korea Indus Co. Ltd

 

Changmin Kim (M.E) (2015.02-2017.02)
 
Graduation Paper (2017)
-Development of optical contact force sensor based on elastomer for biomedical applications
AP System

 

Eunseon Park (M.E) (2015.02-2017.02)
 
Graduation Paper (2017)
-The study on the effect of solvents on collection efficiency of electret filter
SK Magic

 

Juhyung Lee (M.E) (2015.02-2017.02)
 
Graduation Paper (2017)
-LCD 제조용 베이킹 챔버의 환기 성능 향상을 위한 수치적 연구
ZEUS Co. Ltd

 

Seokjun Hong (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-Analysis of pad surface evolution using optical sensor in CMP process
NPTL Ph.D course

 

Sungmin Kang (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-
SAMSUNG Electronics (SSIT)

 

Ki Min (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-
SAMSUNG Electronics (SSIT)

 

Minho Hong (M.E) (2015.03-2017.02)
 
Graduation Paper (2017)
-
SAMSUNG Electronics (SSIT)

 

Hyunjae Chung (M.E) (2016.03-2018.02)
 
Graduation Paper (2018)
-A Study on the Degradation of Polyurethane pad by Hydrogen Peroxide in Chemical Mechanical Polishing
Applied Materials Korea (AMK)

 

Jihye Choi (M.E) (2016.03-2018.02)
 
Graduation Paper (2018)
-A Study on Kinematic Model for CMP Pad Conditioning Profile in Conditioning Process
SAMSUNG Electronics

Sang Yoon Shin (M.E)
 
 
SAMSUNG Electronics (SSIT)

 

Sungil Cho (M.E)
 
 
SAMSUNG Electronics (SSIT)

 

Daeguen Cho (SAINT)
 
ISEL

 

Hong Jie (M.E)
 
Graduation Paper (2019)
-A study of microparticle deposition on flat surface by electrostatic force
ZEUS

 

Kyomin Choi (M.E)
 
Graduation Paper (2019)
-도시철도 운행시 발생하는 터널 내 초미세먼지 입경분포 특성에 관한 연구
Korea Railroad Research Institute

 

Sung Bin Lee (M.E)
 
 
SAMSUNG Electronics

 

Hyun Su Lim (M.E)
 
 
SAMSUNG Electronics
 

 

Seok Joon Kim (M.E)
 
 
SAMSUNG Electronics