Alumni

Master (68)

Kyungtag Nam (M.E)

Graduation Paper (2008)

-A Study on the evaluation method for 45 nm-level megasonic deaning system

STX Heavy Industry

Myungjun Lee (M.E)

Graduation Paper (2008)

-Study of design technology on flow distribution of large scale membrane filtration facility.

Korea Water

Younggil Kim (M.E)

Graduation Paper (2008)

-A study on the effect of optical particle sensor chamber shape for higher counting efficiency

SAMSUNG Semiconductor

Daekwang Woo (SAINT) (2006.03-2008.02)

Graduation Paper (2008)

-A study on the emission characteristics of nanoparticles from vehicle exhaust

NPTL Ph.D course

Yonghyun Cho (SAINT)

Graduation Paper (2009)

-Gas-phase synthesis of silicon nanoparticles and mixing with graphite powders by using counter-flow injection

SAMSUNG Electronics

Jaeho Cho (SAINT)

Graduation Paper (2009)

-Numerical study of silver nanoparticle transport in the exposure chamber

HCT & NPTL Ph.D course

Hoomi Choi (M.E) (2007.03-2009.02)

Graduation Paper (2009)

-Film formation and application using atmospheric aerosol spray method

NPTL Ph.D course

Nguyen Thi Kieu Hanh (SAINT)

Graduation Paper (2009)

-Evaluation of chemical composition of aquatic nanoparticles and atmospheric aerosols

Nongnam University

Dukmin Ahn (SSIT)

Graduation Paper (2010)

-Effects of surface cleaning on the metal electrode of DRAM capacitor

SAMSUNG Semiconductor

Donghyun Yoo (M.E)

Graduation Paper (2010)

-Analysis for pattern damage reduction during megasonic cleaning

Seyoung Kim (M.E)

Graduation Paper (2011)

-Experimental study of axial-flow cyclone in the air handing unit

DAP (디에이피)

Jaewon Min (SSIT)( -2010.12)

Graduation paper

-Comparison of Jet Spray and Megasonic Module for a Cleaning of Aluminum Layer Surface

SSIT 삼성반도체

Empty

Myunghun Oh (SSIT)

Graduation Paper (2011)

-Investigation on Silicon Particle Generation during Dichlorosilane-Based WSi DepositionProcess

SSIT 삼성반도체

Kangjun Kim (SAINT) (2009.09-2011.07)

Graduation Paper (2011)

-Characterization of wear between polishing pads, conditioners, and wafers

Shinhan Diamond (신한다이아몬드)

Dongwoo Kim (M.E) (2009.09-2011.07)

Graduation Paper (2011)

-Improve the initial CMP performance with the modified surface roughness of CMP pad

The Dow Chemical Company

Hang Zhang (SAINT) (2009.09-2011.07)

Graduation Paper (2011)

-Development of bio-chem sensors based on optical and nano technology

SAMSUNG Electronics

Hongyi Qin (SAINT) (2010.09-2012.07)

Graduation Paper (2012)

-Synthesis of polypyrrole nanofilm and its study as optical fiber sensor

NPTL Ph.D course

Yang Xu (SAINT) (2011.09-2013.07)

Graduation Paper (2013)

-Development of Chem-Bio sensors based on optical fiber system and silicon nanowire array field effect transistor

SAMSUNG Electronics

Donghyun Lim （SSIT) (2010.03-2012.02)

Graduation Paper (2012)

Study on the filtration effects in the ceria based chemical mechanical polishing(CMP)

Samsung Electronics

Dongwon Oh (M.E) (2013.03-2015.12)

Graduation Paper (2015)

SAMSUNG Semiconductor

Kihyung Ko (M.E) (2013.03-2016.12)

Graduation Paper (2015)

SAMSUNG Semiconductor

Kwangmin Seo (M.E) (2013.03-2016.02)

Graduation Paper (2015)

SAMSUNG Electronics

Huihwan Lee (M.E) (2014.03-2016.02)

Graduation Paper (2015)

SAMSUNG Electronics

Jinwoo Park (M.E) (2014.09-2016.08)

Graduation Paper (2016)

-Study on the stress distribution on the wafer during CMP process by numerical and experimental methods

SK Hynix

Sungjune Yang (M.E) (2015.03-2017.09)

Graduation Paper (2017)

SAMSUNG Electronics

Kihong Park (M.E) (2015.03-2017.02)

Graduation Paper (2017)

-Development of Real-time and In-line process monitoring of liquid chemical concentration during semiconductor manufacturing

LTCAM

Sanghuck Jeon (M.E) (2015.03-2017.02)

Graduation Paper (2017)

-Study on the CMP slurry additives for improving removal rate and selectivity of poly-Si and Si3N4 films under acidic condition

LTCAM

	Jinhak Choi (M.E) (2015.03-2017.02) Graduation Paper (2017) -Effect of ceria abrasive synthesized by supercritical hydrothermal method for chemical mechanical planarization LTCAM
	Juhyun Son (M.E) (2015.02-2017.02) Graduation Paper (2017) -Synthesis of wafer scale molybdenum oxide using plasma process and humidity sensor application Parkor Korea Indus Co. Ltd
	Changmin Kim (M.E) (2015.02-2017.02) Graduation Paper (2017) -Development of optical contact force sensor based on elastomer for biomedical applications AP System
	Eunseon Park (M.E) (2015.02-2017.02) Graduation Paper (2017) -The study on the effect of solvents on collection efficiency of electret filter SK Magic
	Juhyung Lee (M.E) (2015.02-2017.02) Graduation Paper (2017) -LCD 제조용 베이킹 챔버의 환기 성능 향상을 위한 수치적 연구 ZEUS Co. Ltd
	Seokjun Hong (M.E) (2015.03-2017.02) Graduation Paper (2017) -Analysis of pad surface evolution using optical sensor in CMP process NPTL Ph.D course
	Sungmin Kang (M.E) (2015.03-2017.02) Graduation Paper (2017) - SAMSUNG Electronics (SSIT)
	Ki Min (M.E) (2015.03-2017.02) Graduation Paper (2017) - SAMSUNG Electronics (SSIT)
	Minho Hong (M.E) (2015.03-2017.02) Graduation Paper (2017) - SAMSUNG Electronics (SSIT)
	Hyunjae Chung (M.E) (2016.03-2018.02) Graduation Paper (2018) -A Study on the Degradation of Polyurethane pad by Hydrogen Peroxide in Chemical Mechanical Polishing Applied Materials Korea (AMK)
	Jihye Choi (M.E) (2016.03-2018.02) Graduation Paper (2018) -A Study on Kinematic Model for CMP Pad Conditioning Profile in Conditioning Process SAMSUNG Electronics
	Sang Yoon Shin (M.E) SAMSUNG Electronics (SSIT)
	Sungil Cho (M.E) SAMSUNG Electronics (SSIT)
	Daeguen Cho (SAINT) ISEL
	Hong Jie (M.E) Graduation Paper (2019) -A study of microparticle deposition on flat surface by electrostatic force ZEUS
	Kyomin Choi (M.E) Graduation Paper (2019) -도시철도 운행시 발생하는 터널 내 초미세먼지 입경분포 특성에 관한 연구 Korea Railroad Research Institute
	Juhwan Kim (ME) (2017.02-2019.02) -NPTL Ph.D course
	Donggeon Kwak (ME) (2017.02-2019.02) -NPTL Ph.D course
	Eungchul Kim (ME) (2017.02-2019.02) -NPTL Ph.D course
	Dongjoo Shin (ME) (2017.02-2019.02) -NPTL Ph.D course
	Vinit Kanade (SAINT) (2017.02-2019.02) -NPTL Ph.D course
	Sung Bin Lee (M.E) SAMSUNG Electronics
	Hyun Su Lim (M.E) SAMSUNG Electronics
	Seok Joon Kim (M.E) SAMSUNG Electronics
	Youn Sun Cho (M.E) LG Electronics
	Geunsang Park (M.E) (2018.03-2020.02) Graduation Paper (2020) -A Study on Portable Axial Wet Cyclone for The Fungi Collection Korea Institute of Machinery & Materials(KIMM)
	Hyeseon Lee (M.E) (2018.03-2020.07) Graduation Paper (2020) -Liquid filtration Wonik IPS
	Dongseop Park（SSIT）(2019.3~2021.2) Graduation Paper (2021) - A Study on the Separation and Stack Control Technology of 2D Materials Using Metal Thin Film Samsung Display
	Eunmi Kim (M.E) (2019.03-2021.02) Graduation Paper (2021) -A study of micro particle deposition on the glass substrate and its application to AOI performance evaluation SEMES
	Seulgi Choi (ME) (2019.07-2021.07) Graduation Paper (2021) -Slurry Flow Analysis Based on CFD Simulation During Chemical Mechanical Polishing Process Lam Research (Korea)
	Jiah Hong (ME) (2019.07-2021.07) Graduation Paper (2021) -Investigation of Abrasive-free Slurry for Polysilicon Buffing CMP TEL (Korea)
	Junho Yun (ME) (2019.12-2021.12) Graduation Paper (2021) -Study of development on the combined process of CMP using residual slurry SK siltron
	Jungryul Lee (ME) (2019.12-2021.12) Graduation Paper (2021) -Study on characteristics of nano abrasive between pad asperity adn oxide thin film in CMP process -Samsung Electronics
	Yeongkwang Cho (ME) (2019.12-2021.12) Graduation Paper (2021) -Pad groove effect on slurry flow in CMP process Hyundai motor
	Hyeonmin Seo (ME) (2019.12-2021.12) Graduation Paper (2021) -Tagential flow filtration of ceria slurry: application to improve PCMP cleaning Samsung Electronics
	Jongsoo Han (ME) (2019.12 - 2022.09) Graduation Paper (2022) -Cu Undercut 개선형 Ti Etchant 연구 LTCAM
	Hyunmo Ahn (ME) (2021.02-2023.02) Graduation Paper (2023) -Development of chemical mechanical planarization end point detection algorithm with eddy current sensor
	고영란 - Youngran Ko (ME) (2021.02-2023.02) Graduation Paper (2023) - Modification of PTFE characteristics to prevent particle adhesion by static electricity -SEMES
	박동섭- Deongseop Park (ME) (2019.02-2023.02) Graduation Paper (2023) - 금속 박막을 활용한 이차원 소재의 분리 및 적층 제어기술 - SSIT
	한현준 - Hyeonjoon Han (ME) (2020.02-2023.02) Graduation Paper (2023) - HF와 고농도 O3 혼합액을 이용한 wafer 초미세입자 제거 - Samsung Electronics
	이용준 - Yongjun Lee (ME) (2020.02-2023.02) Graduation Paper (2023) - Vertical NAND cell array 의 wet / dry etching 특성 및 gap-fill 개선방안 연구 - Samsung Electronics
	설문성 - Wenxing Xue (ME) (2021.7-2023.7) Graduation Paper (2023) - Investigation of the slurry temperature effect during tungsten chemical mechanical planarization - PSK Inc.
	남유나 - Yuna Nam (ME) (2021.2-2024.2) Graduation Paper (2024) - Investigation of the functional water effect on the ceria nanoparticle in buff CMP cleaning
	전우경- Wookyung Jeon (ME) (2022.2-2024.2) Graduation Paper (2024) - Investigation of Molybdenum Recess during Overall Chemical Mechanical Planarization
	최상환- Sanghwan Choi (ME) (2022.2-2024.2) Graduation Paper (2024) - Study on Selective Nanoscale Fabrication and Work Function Control of Polycrystalline Silicon by Physically Induced Binds
	이승환 - Seunghwan Lee(ME) (2022.2-2024.2) -NPTL Ph.D course
	이진형 - Jinhyoung Lee (ME) (2022.2-2024.2) -NPTL Ph.D course
	손시훈 - Sihoon Son (SAINT) (2022.2-2024.2) -NPTL Ph.D course

	Dr. Sudheer Kumar Shukla - Waste water treatment and recycling - Membrane separation process - Environmental impact assessment - Air quality/pollution assessment
	Dr. Dinesh Amalnerkar Post doc. Hanyang University Publication
	Prof. Atul Kullkarni Professor and Director Symbiosis Centre for Nanoscience and Nanotechnology (SCNN) Symbiosis International University Publication
	Dr. Sangjun Lee
	Dr. Nilam Qureshi
	Dr. Dongbin Kim Post doc. University of Minnesota Post doc. 국토교통과학기술진흥원 LG display
	Dr. Hyeong-U Kim KIMM (Korea Institute of Machinery & Materials)

	Kwangsu Kim (SAINT) Graduation Paper (2010) - Synthesis of silicon and silicon suboxide nanoparticle using inductively coupled plasma and its applications 대림대학교 Professor
	Jichul Yang (SSIT) Graduation Paper (2011) - A study of Nano-ceria slurry chemical mechanical planarization (전) SK HYNIX (메모리 파트 CMP 임원) (현) EBARA Vice President (Global Tech. Research & Marketing)
	Daekwang Woo (ME) (2008-03.2013.02) Graduation Paper (2013) - A study on the emission characteristics and on-road spatial distribution of ultrafine particles from vehicles in atmospheric environment SAMSUNG Semiconductor (삼성반도체)
	Hoomi Choi (SAINT) (2009.03-2013.02) Graduation Paper (2013) - A study on CO2 gas cluster generation and its application to contamination control in surface processing SAMSUNG Semiconductor (삼성반도체)
	Hojoong Kim (SAINT) (2007.03-2013.02) Graduation Paper (2013) - A study on dynamic interactions of slurry and nano abrasive in chemical mechanical planarization process SAMSUNG Semiconductor (삼성반도체)
	Youngki Ahn (ME) (2008.03-2015.02) Graduation Paper (2014) - A study on the single-wafer physical cleaning to reduce pattern damage 대림대학교 Professor
	Jihun Mun (SAINT) (2008.03-2015.08) Graduation Paper (2015) - Low Temperature Synthesis of Molybdenum Disulfide Atomic Layer KRISS (Korea Research Institute of Standards and Science)
	Chisung Ahn (SAINT) (2010.03-2016.02) Graduation Paper (2015) - Low temperature Synthesis and Layer Control of MoS2 thin film by plasma process KITECH (Korea Institute of Industrial Technology)
	Hongyi Qin (SAINT) (2012.08-2016.08) Graduation Paper (2016) -Development and Application of Graphene Derivatives for Water Treatment and Sensors Huawei (화웨이)
	Soohyun Ha (SAINT) (2009.03-2017.02) Graduation Paper (2017) -A study on the Mass production of charged aerosol using electric field assisted atmization SAMSUNG Semiconductor (삼성반도체)
	Myungjun Kim (M.E) (2009.03-2017.02) Graduation Paper (2017) -A study on Collimated Particle Beam Generation SAMSUNG Semiconductor (삼성반도체)
	Jangah Kim (SAINT) (2011.03-2017.02) Graduation Paper (2017) - Development of optical fiber sensors for biomedical and biochemical applications Post doc. Imperial College London
	Sunjae Jang (M.E) (2011.03-2017.02) Graduation Paper (2017) - A study on the Effect of Slurry Characteristics in chemical mechanical planarization process Samsung electronics (반도체연구소)
	Junggil Na (M.E) JJ CONSULTING & SOLUTIONS
	Giwoon Sung (M.E) (2011.03-2018.02) Graduation Paper (2018) -Study on Fine Atmospheric Aerosols Sampling and Concentration Samsung Display (삼성 디스플레이)
	Youngseok Kim (M.E) (2012.09-2018.08) Graduation Paper (2018) -Development of multi-direction thermoelectric property measurement system Samsung Electronics
	Dr. Dongbin Kim (ME) (2011.03-2018.02) Graduation paper (2018) -(A) study on the development of real-time particle analyzing apparatus and the PECVD process diagnosis Post doc. University of Minnesota Post doc. 국토교통과학기술진흥원 LG display
	Hyeong-U Kim (SAINT) (2013.03-2019.02) Graduation Paper (2019) -Large Scale Synthesis of Different Phase MoS2 and its Heterostructure using Plasma Enhanced CVD for Electrochemical Applications Post Doc. Northwestern University
	Cheolmin Shin (M.E) (2013.03-2019.02) Graduation Paper (2019) -A Study on Physico-Chemical Interaction in CMP Tribology SK HYNIX
	Yinhua Jin (SAINT) (2014.09-2019.02) Graduation Paper (2019) -Chemical Functionalization of Graphene Oxide and Graphene Quantum Dots for Urnium Adsorption and Bio-imaging SEMES
	Yongil Lee (M.E) (2014.03-2019.02) Graduation Paper (2019) -Generation Characteristics of Airborne Wear Particles in Subway Operation Korea Railroad Research Institute (KRRI)
	Yujin Cho (M.E) (2011.09-2020.02) Graduation Paper (2020) -A Study of Aerosol Behavior in Supersonic Nozzle and Its Application to Semiconductor Cleaning and Film Deposition SEMES
	Seokjun Hong (M.E) (2017.03-2021.02) Graduation Paper (2021) - A Study on Slurry Flow and Abrasive Behavior in CMP and Post-CMP Cleaning Samsung Electronics
	Kyungho Hwang (ME) (2018.09 -2021.12) Graduation paper (2021) -A Study on Relative Motion of Rotary Type Chemical and Mechanical Polishing SK HYNIX
	Chaitanya Kanade (SAINT) (2018.09-2022.09) Graduation paper (2022) -Low Temperature Synthesis of MoS2 and WS2 Heterostructures using Plasma Enhanced Chemical Vapor Deposition and Their Applications Centre for Materials for Electronic Technology, Pune (C-MET, Pune)
	Changmin Kim (ME) (2019.02 - 2023.02) Graduation paper (2023) -The Experimental and Numerical Study on the Plasma Etching Process of Two-dimensional MoS2 KIMM Post Doc.
	Juhwan Kim (ME) (2017.02-2023.02) Graduation paper (2023) -Study on the Effects of Slurry Properties on Cu Chemical Mechanical Planarization Samsung Electronics
	Donggeon Kwak (ME) (2017.02-2023.02) Graduation paper (2023) -Study on the Size Distribution Measurement of Slurry Abrasive with Aerosol-based Analysis in Chemical Mechanical Planarization Samsung Electronics
	Eungchul Kim (ME) (2017.02-2023.02) Graduation paper (2023) -Mechano-electrochemical interface reaction of silica and ceria abrasives during chemical mechanical polishing Samsung Electronics
	Dongjoo Shin (ME) (2017.02-2023.02) Graduation paper (2023) -Development of wearable optical fiber sensors for human motion monitoring
	Vinit Kanade (SAINT) (2017.02-2023.02)
	이인구-Inkoo Lee (ME) (2019.2-2023.7) - Collaboration Center
	전상혁-Sanghuck Jeon (ME) (2020.2-2024.2) Graduation paper (2023) -Study on Pad Surface Engineering in Chemical Mechanical Planarization Samsung Electronics

People

Research Professor (7)

Ph.D (33)

Master (68)

	Kyungtag Nam (M.E) Graduation Paper (2008) -A Study on the evaluation method for 45 nm-level megasonic deaning system STX Heavy Industry
	Myungjun Lee (M.E) Graduation Paper (2008) -Study of design technology on flow distribution of large scale membrane filtration facility. Korea Water
	Younggil Kim (M.E) Graduation Paper (2008) -A study on the effect of optical particle sensor chamber shape for higher counting efficiency SAMSUNG Semiconductor
	Daekwang Woo (SAINT) (2006.03-2008.02) Graduation Paper (2008) -A study on the emission characteristics of nanoparticles from vehicle exhaust NPTL Ph.D course
	Yonghyun Cho (SAINT) Graduation Paper (2009) -Gas-phase synthesis of silicon nanoparticles and mixing with graphite powders by using counter-flow injection SAMSUNG Electronics
	Jaeho Cho (SAINT) Graduation Paper (2009) -Numerical study of silver nanoparticle transport in the exposure chamber HCT & NPTL Ph.D course
	Hoomi Choi (M.E) (2007.03-2009.02) Graduation Paper (2009) -Film formation and application using atmospheric aerosol spray method NPTL Ph.D course
	Nguyen Thi Kieu Hanh (SAINT) Graduation Paper (2009) -Evaluation of chemical composition of aquatic nanoparticles and atmospheric aerosols Nongnam University
	Dukmin Ahn (SSIT) Graduation Paper (2010) -Effects of surface cleaning on the metal electrode of DRAM capacitor SAMSUNG Semiconductor
	Donghyun Yoo (M.E) Graduation Paper (2010) -Analysis for pattern damage reduction during megasonic cleaning 3M
	Seyoung Kim (M.E) Graduation Paper (2011) -Experimental study of axial-flow cyclone in the air handing unit DAP (디에이피)
	Jaewon Min (SSIT)( -2010.12) Graduation paper -Comparison of Jet Spray and Megasonic Module for a Cleaning of Aluminum Layer Surface SSIT 삼성반도체
Empty	Myunghun Oh (SSIT) Graduation Paper (2011) -Investigation on Silicon Particle Generation during Dichlorosilane-Based WSi DepositionProcess SSIT 삼성반도체
	Kangjun Kim (SAINT) (2009.09-2011.07) Graduation Paper (2011) -Characterization of wear between polishing pads, conditioners, and wafers Shinhan Diamond (신한다이아몬드)
	Dongwoo Kim (M.E) (2009.09-2011.07) Graduation Paper (2011) -Improve the initial CMP performance with the modified surface roughness of CMP pad The Dow Chemical Company
	Hang Zhang (SAINT) (2009.09-2011.07) Graduation Paper (2011) -Development of bio-chem sensors based on optical and nano technology SAMSUNG Electronics
	Hongyi Qin (SAINT) (2010.09-2012.07) Graduation Paper (2012) -Synthesis of polypyrrole nanofilm and its study as optical fiber sensor NPTL Ph.D course
	Yang Xu (SAINT) (2011.09-2013.07) Graduation Paper (2013) -Development of Chem-Bio sensors based on optical fiber system and silicon nanowire array field effect transistor SAMSUNG Electronics
	Donghyun Lim （SSIT) (2010.03-2012.02) Graduation Paper (2012) Study on the filtration effects in the ceria based chemical mechanical polishing(CMP) Samsung Electronics
	Dongwon Oh (M.E) (2013.03-2015.12) Graduation Paper (2015) - SAMSUNG Semiconductor
	Kihyung Ko (M.E) (2013.03-2016.12) Graduation Paper (2015) - SAMSUNG Semiconductor
	Kwangmin Seo (M.E) (2013.03-2016.02) Graduation Paper (2015) - SAMSUNG Electronics
	Huihwan Lee (M.E) (2014.03-2016.02) Graduation Paper (2015) - SAMSUNG Electronics
	Jinwoo Park (M.E) (2014.09-2016.08) Graduation Paper (2016) -Study on the stress distribution on the wafer during CMP process by numerical and experimental methods SK Hynix
	Sungjune Yang (M.E) (2015.03-2017.09) Graduation Paper (2017) - SAMSUNG Electronics
	Kihong Park (M.E) (2015.03-2017.02) Graduation Paper (2017) -Development of Real-time and In-line process monitoring of liquid chemical concentration during semiconductor manufacturing LTCAM
	Sanghuck Jeon (M.E) (2015.03-2017.02) Graduation Paper (2017) -Study on the CMP slurry additives for improving removal rate and selectivity of poly-Si and Si3N4 films under acidic condition LTCAM